STTR Phase II: Advanced Control of Electron-Beam Deposition for High Precision Optical Coatings

STTR 第二阶段：高精度光学镀膜电子束沉积的高级控制

• 批准号: 0548726
• 负责人: Gregory Reimann
• 金额: --
• 依托单位: Cyber Materials Solutions
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-04-15 至 2009-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0548726&HistoricalAwards=false
• 关键词: STTR; Phase; II; Advanced; Control

This Small Business Technology Transfer (STTR) Phase II project leverages the substantial improvements in e-beam process control capability developed in Phase I into an integrated control system that can significantly increase yield and throughput for the $1.8 billion precision optical coating industry. Manufacturing partners indicate that the target performance levels would cut manufacturing costs by 35% and enable manufacturers to routinely achieve greater tolerances for advanced designs. This research is driven by a first-principles systems based approach that has created new intellectual property for monitoring, control, and process design. Commercially, precision optical coatings are critical components for all optical instruments including microscopes, telescopes, vision and imaging systems, projection systems, and laser systems. Coatings have served these industries for years, but in a world where application requirements and scientific inquiry are constantly advancing, precision coatings are demanded that comply with even tighter tolerances. In particular, high energy laser science such as the NIF facility at Livermore require very precise and reliable coatings. This STTR research will be key to further improving manufacturing capabilities for a variety of important applications.

这个小企业技术转让（STTR）第二阶段项目利用了第一阶段开发的电子束过程控制能力的重大改进，将其转化为一个集成控制系统，可以显着提高18亿美元精密光学镀膜行业的产量和吞吐量。制造合作伙伴表示，目标性能水平将使制造成本降低35%，并使制造商能够为先进的设计实现更大的公差。这项研究是由基于第一原理系统的方法驱动的，该方法为监测，控制和工艺设计创造了新的知识产权。在商业上，精密光学涂层是所有光学仪器的关键部件，包括显微镜，望远镜，视觉和成像系统，投影系统和激光系统。多年来，涂料一直服务于这些行业，但在应用要求和科学研究不断进步的世界中，精密涂料需要符合更严格的公差。特别是，高能激光科学，如利弗莫尔的NIF设施，需要非常精确和可靠的涂层。这项STTR研究将是进一步提高各种重要应用的制造能力的关键。