MRI: Acquisition of chlorine based reactive ion etcher

MRI：购买氯基反应离子蚀刻机

• 批准号: 0721543
• 负责人: Aaron Hawkins
• 金额: --
• 依托单位: Brigham Young University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0721543&HistoricalAwards=false
• 关键词: MRI; Acquisition; chlorine; based; reactive

The objective of this research is to use a chlorine based reactive ion etcher for a variety of micro and nanofabrication projects at Brigham Young University. Six existing projects will be immediately affected and many future projects will be benefited by the new reactive ion etch capabilities. The approach is to acquire and install a chlorine based reactive ion etcher in the cleanroom facility at Brigham Young University. The machine will be fully characterized and then made available to campus-wide researchers and for graduate and undergraduate laboratory classes. Intellectual merit: The research supported by a reactive ion etcher will be multidisciplinary in nature and will include new chemical and biological sensors with integrated photonics and microfluidics, DNA-templated nanofabrication, patterned microchannels for ultrahydrophobic surfaces, RF MEMS switches with improved response times and current carrying capability, and high temperature fiber sensors. Broader Impact: The new machine and cleanroom will aid in the recruitment of underrepresented minority students to engineering and science fields through an existing program designed to prepare minority high school students for college and careers. This program brings hundreds of students to the Brigham Young University campus during the summer and includes interactions with the cleanroom facility. Outreach programs aimed at science teachers and their students will also be enhanced by giving participants hands-on encounters with the very leading edge of science and technology. Finally, the reactive ion etcher will impact nearby universities and technology companies, as it will provide a valuable resource never before available in the State of Utah.

这项研究的目的是在杨百翰大学的各种微纳米制造项目中使用氯基活性离子蚀刻剂。六个现有项目将立即受到影响，许多未来项目将受益于新的反应离子蚀刻能力。该方法是在杨百翰大学的洁净室设施中获得并安装氯基活性离子蚀刻机。这台机器将被充分表征，然后提供给全校范围内的研究人员以及研究生和本科生实验班。智力优势：由反应离子蚀刻器支持的研究将是多学科性质的，将包括集成光子学和微流体的新型化学和生物传感器，dna模板纳米制造，超疏水表面的图案微通道，具有改进响应时间和载流能力的RF MEMS开关，以及高温光纤传感器。更广泛的影响：新的机器和洁净室将通过一个旨在为少数民族高中学生上大学和就业做准备的现有项目，帮助招募代表性不足的少数民族学生进入工程和科学领域。该项目在夏季将数百名学生带到杨百翰大学校园，并与无尘室设施进行互动。针对科学教师及其学生的外展项目也将得到加强，让参与者亲身接触最前沿的科学技术。最后，反应离子蚀刻机将影响附近的大学和科技公司，因为它将提供犹他州从未有过的宝贵资源。