STTR PHASE I: Application of an Electrostatic Actuator Stable-Range-of-Motion Enhancement Control Law to Improve MEMS Gyroscopic Sensors

STTR 第一阶段：应用静电执行器稳定运动范围增强控制律来改进 MEMS 陀螺仪传感器

• 批准号: 0741195
• 负责人: Samuel French
• 金额: $ 14.99万
• 依托单位: MEMSense, LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0741195&HistoricalAwards=false
• 关键词: STTR; PHASE; Application; Electrostatic; Actuator

This STTR Phase I research project will seek to significantly reduce the size and cost of MEMS gyroscopes through improving the internal electrostatic actuators. Specifically, this effort will commercialize Auburn University's patent protected technique for extending the stable range of motion of micromachined gap-closing actuators, so that the actuator size can be reduced while still producing the same range of motion. This technique not only increases the actuator's stable range of motion, it also allows for a denser architecture, further reducing actuator size. Auburn University will utilize its expertise and facilities to characterize and optimize the proposed technique. The scientific merit of this effort also includes the development of a sensorless technique for increasing the stable range of motion of micromachined electrostatic parallel plate and gap-closing actuators that can be applied to many types of MEMS devices in addition to gyroscopes.A limitation of many types of MEMS devices has been the limited stable range of motion of micromachined electrostatic parallel plate and gap-closing actuators, with applications such as variable capacitors, micro mirror based spatial light modulators and precision inertial sensors that utilize actuators. Most techniques developed to alleviate this problem either involve expensive changes to the physical design or complex motion sensor based controller approaches. This research can lead to new MEMS products, the application of existing MEMS products to new applications, and an enhanced understanding of the capabilities and limitations of micromachined devices.

STTR 第一阶段研究项目将寻求通过改进内部静电执行器来显着减小 MEMS 陀螺仪的尺寸和成本。具体来说，这项工作将使奥本大学的专利保护技术商业化，该技术用于扩展微机械间隙闭合执行器的稳定运动范围，从而可以减小执行器的尺寸，同时仍产生相同的运动范围。该技术不仅增加了执行器的稳定运动范围，还允许采用更密集的架构，进一步减小执行器的尺寸。奥本大学将利用其专业知识和设施来表征和优化拟议技术。这项工作的科学价值还包括开发一种无传感器技术，用于增加微机械静电平行板和间隙闭合致动器的稳定运动范围，该技术可应用于除陀螺仪之外的多种类型的 MEMS 设备。 电容器、基于微镜的空间光调制器和利用执行器的精密惯性传感器。大多数为缓解这个问题而开发的技术要么涉及对物理设计的昂贵改变，要么涉及基于复杂运动传感器的控制器方法。这项研究可以带来新的 MEMS 产品、现有 MEMS 产品在新应用中的应用，以及增强对微机械设备的功能和局限性的理解。