Grenzflächenausbildung zwischen LiNbO3 Einkristallsubstraten und Barriereschichten für den Einsatz bei Metallisierungssystemen für Oberflächenwellenstrukturen

用于表面波结构金属化系统的 LiNbO3 单晶衬底和势垒层之间的界面形成

• 批准号: 187025288
• 负责人: Dr. Steffen Oswald
• 金额: --
• 依托单位: Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden (IFW) e.V.
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2010
• 资助国家: 德国
• 起止时间: 2009-12-31 至 2014-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/187025288?language=en
• 关键词: Grenzfl; chenausbildung; zwischen; LiNbO3; Einkristallsubstraten

Surface acoustic wave devices of new generation have new metallization systems such like Cu or high-texture Al. To reach high-sophisticated device behavior the implementation of barrier layers are necessary. Aim is to generate nm-thick barriers which hinder interdiffusion and should guarantee good adhesion and surface acoustic behavior. Thus the interface properties between substrate/barrier/metallization have to be optimized.In the project the interface properties of Li-niobate (and Li-tantalate) substrates and Ta-(Ti-) based barrier layers are studied mainly by X-ray photoelectron spectroscopy (XPS). Chemical information studied by peak shape changes and morphology properties investigated with angle-resolved XPS (ARXPS) are in the main focus of interest. Plasma treatment before barrier deposition is one major issue but also mechanical and thermal behavior of the barrier system will be studied. Included will be a part for the study of highly-textured Al metallization because before Al deposition a special (Ti) barrier is necessary. At the end the production and testing of some demonstrator SAW-structures is planned.

新一代的表面声波器件具有新的金属化系统，如Cu或高织构Al。为了达到高精密的器件性能，必须实现屏障层。目的是产生纳米厚的屏障，以阻止相互扩散，并应保证良好的附着力和表面声学性能。因此，衬底/势垒/金属化之间的界面特性必须优化。本项目主要利用x射线光电子能谱（XPS）研究铌酸锂（和钽酸锂）衬底与Ta-(Ti-)基势垒层的界面性质。通过峰形变化研究的化学信息和角分辨XPS （ARXPS）研究的形态性质是主要的兴趣焦点。障壁沉积前的等离子体处理是一个主要问题，但障壁系统的力学和热行为也将被研究。由于在Al沉积之前需要一个特殊的（Ti）屏障，因此将包括高织构Al金属化研究的一部分。最后，对部分样机的生产和测试进行了规划。