Grenzflächenausbildung zwischen LiNbO3 Einkristallsubstraten und Barriereschichten für den Einsatz bei Metallisierungssystemen für Oberflächenwellenstrukturen

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Surface acoustic wave devices of new generation have new metallization systems such like Cu or high-texture Al. To reach high-sophisticated device behavior the implementation of barrier layers are necessary. Aim is to generate nm-thick barriers which hinder interdiffusion and should guarantee good adhesion and surface acoustic behavior. Thus the interface properties between substrate/barrier/metallization have to be optimized.In the project the interface properties of Li-niobate (and Li-tantalate) substrates and Ta-(Ti-) based barrier layers are studied mainly by X-ray photoelectron spectroscopy (XPS). Chemical information studied by peak shape changes and morphology properties investigated with angle-resolved XPS (ARXPS) are in the main focus of interest. Plasma treatment before barrier deposition is one major issue but also mechanical and thermal behavior of the barrier system will be studied. Included will be a part for the study of highly-textured Al metallization because before Al deposition a special (Ti) barrier is necessary. At the end the production and testing of some demonstrator SAW-structures is planned.