Resonant Nano Electro Mechanical Systems adapted for Sensing

适用于传感的谐振纳米机电系统

• 批准号: 1001742
• 负责人: Jeevak Parpia
• 金额: $ 39万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-06-01 至 2013-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1001742&HistoricalAwards=false
• 关键词: Resonant; Nano; Electro; Mechanical; Systems

Project SummaryObjectives: In this proposal we will provide the enabling science and technical underpinnings that will move sensing with N/MEMS beyond the realm of a scientific curiosity. We will investigate the dissipation of diverse resonant N/MEMS operating in air, leading to optimized performance in air, the carrier gas from which analytes will be sensed. We will also enable and demonstrate sensing of volatile organics.The intellectual merit rests on our three pronged approach: 1. To reduce radiated sound energy that damps the motion of resonators in air, making the resonant frequency shift a more sensitive transduction mechanism. 2. To investigate tensile stress to increase the Q in polysilicon and other low loss materials and also expose the origin of the enhancement of Q by stress. 3. To explore stress-based sensing where an analyte in the air induces a change in stress in a functionalizing coating on a surface The broader impacts for the proposed research extend to high Q systems under investigation for quantum computation as mechanical qubits (the Q providing a high fidelity). Our research will enable diverse sensing functions for security and threat recognition from chemical and biological agents. Other benefits will flow from our planned REU and K-12 initiatives. The integration of undergraduates in aspects of the research and links to applications will benefit a broad spectrum of junior scientists, and equip them with practical problem-solving knowledge that extends beyond the classroom or laboratory environment.

项目概述目标：在这项提案中，我们将提供使N/MEMS传感超越科学好奇心的使能科学和技术基础。我们将研究在空气中工作的各种谐振N/MEMS的损耗，从而优化空气中的性能，空气中的载气将被检测到分析物。我们还将启用并演示对挥发性有机物的传感。智能优势在于我们的三个方面的方法：1.减少辐射声能，使共振频移成为更灵敏的传导机制。辐射声能抑制谐振器在空气中的运动。2.研究多晶硅等低损耗材料中提高Q的张应力，揭示应力提高Q的原因。3.为了探索基于应力的传感，即空气中的分析物在表面功能化涂层中引起应力变化，拟议研究的更广泛的影响延伸到正在研究的作为机械量子比特的量子计算的高Q系统(Q提供高保真)。我们的研究将为化学和生物制剂的安全和威胁识别提供多样化的传感功能。我们计划中的REU和K-12计划将带来其他好处。本科生在研究和应用方面的整合将使广泛的初级科学家受益，并使他们掌握超越课堂或实验室环境的解决问题的实用知识。