Resonant Nano Electro Mechanical Systems adapted for Sensing

项目概要目标：在本提案中，我们将提供使能的科学和技术基础，使N/MEMS传感技术超越科学好奇心的范畴。我们将研究在空气中工作的各种谐振N/MEMS的耗散，从而优化空气中的性能，分析物将被检测到的载气。我们还将实现和演示挥发性有机物的传感。智力价值取决于我们的三个方面的方法：1。为了减少衰减谐振器在空气中运动的辐射声能，使谐振频率偏移成为更灵敏的换能机制。2.研究张应力对提高多晶硅及其它低损耗材料Q值的影响，并揭示应力提高Q值的原因。3.为了探索基于应力的传感，其中空气中的分析物在表面上的功能化涂层中引起应力的变化，所提出的研究的更广泛的影响扩展到正在研究的高Q系统，用于作为机械量子比特的量子计算（Q提供高保真度）。我们的研究将使不同的传感功能，从化学和生物制剂的安全和威胁识别。其他好处将来自我们计划的REU和K-12计划。本科生在研究和应用链接方面的整合将使广泛的初级科学家受益，并为他们提供超越课堂或实验室环境的实际解决问题的知识。

Project SummaryObjectives: In this proposal we will provide the enabling science and technical underpinnings that will move sensing with N/MEMS beyond the realm of a scientific curiosity. We will investigate the dissipation of diverse resonant N/MEMS operating in air, leading to optimized performance in air, the carrier gas from which analytes will be sensed. We will also enable and demonstrate sensing of volatile organics.The intellectual merit rests on our three pronged approach: 1. To reduce radiated sound energy that damps the motion of resonators in air, making the resonant frequency shift a more sensitive transduction mechanism. 2. To investigate tensile stress to increase the Q in polysilicon and other low loss materials and also expose the origin of the enhancement of Q by stress. 3. To explore stress-based sensing where an analyte in the air induces a change in stress in a functionalizing coating on a surface The broader impacts for the proposed research extend to high Q systems under investigation for quantum computation as mechanical qubits (the Q providing a high fidelity). Our research will enable diverse sensing functions for security and threat recognition from chemical and biological agents. Other benefits will flow from our planned REU and K-12 initiatives. The integration of undergraduates in aspects of the research and links to applications will benefit a broad spectrum of junior scientists, and equip them with practical problem-solving knowledge that extends beyond the classroom or laboratory environment.