Resonant Nano Electro Mechanical Systems adapted for Sensing

项目概述目标：在本提案中，我们将提供使能的科学和技术基础，使传感与N/MEMS超越科学好奇心的领域。我们将研究在空气中工作的各种谐振N/MEMS的耗散，从而优化在空气中的性能，空气是检测分析物的载气。我们还将启用并演示挥发性有机物的传感。知识价值在于我们的三管齐下的方法：1。减少空气中阻尼谐振器运动的辐射声能，使共振频移成为更灵敏的转导机制。2. 研究拉伸应力在多晶硅和其他低损耗材料中增加Q的作用，并揭示应力提高Q的原因。3. 为了探索基于应力的传感，其中空气中的分析物引起表面上功能化涂层的应力变化。对提议的研究的更广泛影响扩展到正在研究的高Q系统，用于量子计算作为机械量子位（Q提供高保真度）。我们的研究将为化学和生物制剂的安全和威胁识别提供多种传感功能。其他好处将来自我们计划的REU和K-12计划。将本科生整合到研究的各个方面以及与应用程序的联系中，将使广泛的初级科学家受益，并使他们具备超越课堂或实验室环境的实际解决问题的知识。

Project SummaryObjectives: In this proposal we will provide the enabling science and technical underpinnings that will move sensing with N/MEMS beyond the realm of a scientific curiosity. We will investigate the dissipation of diverse resonant N/MEMS operating in air, leading to optimized performance in air, the carrier gas from which analytes will be sensed. We will also enable and demonstrate sensing of volatile organics.The intellectual merit rests on our three pronged approach: 1. To reduce radiated sound energy that damps the motion of resonators in air, making the resonant frequency shift a more sensitive transduction mechanism. 2. To investigate tensile stress to increase the Q in polysilicon and other low loss materials and also expose the origin of the enhancement of Q by stress. 3. To explore stress-based sensing where an analyte in the air induces a change in stress in a functionalizing coating on a surface The broader impacts for the proposed research extend to high Q systems under investigation for quantum computation as mechanical qubits (the Q providing a high fidelity). Our research will enable diverse sensing functions for security and threat recognition from chemical and biological agents. Other benefits will flow from our planned REU and K-12 initiatives. The integration of undergraduates in aspects of the research and links to applications will benefit a broad spectrum of junior scientists, and equip them with practical problem-solving knowledge that extends beyond the classroom or laboratory environment.