MRI: Acquisition of a Nanoimprint Lithography System for Nanoscience Research and Education based on Low-Dimensional Materials

MRI：获取基于低维材料的纳米压印光刻系统，用于纳米科学研究和教育

• 批准号: 1040007
• 负责人: Eui-Hyeok Yang
• 金额: $ 17万
• 依托单位: Stevens Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-01-01 至 2013-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1040007&HistoricalAwards=false
• 关键词: MRI; Acquisition; Nanoimprint; Lithography; System

The objective of this research is to acquire a Nanonex 1000 Nanoimprint Lithography System with high-resolution (~10 nm) and high-throughput (~60 sec) capabilities for use in low-dimensional nanoscale research and educational initiatives. The approach is to utilize the requested system for multidisciplinary research projects in nanotechnology and support educational initiatives underway at Stevens. Intellectual Merit The fabrication capabilities enhanced by the requested system will directly impact a variety of research projects spanning many emerging micro/nanotechnology and science areas. The requested system is a state-of-the-art nanolithography tool that will significantly enhance ongoing research projects centered in the multi-user Micro Device Laboratory at Stevens Institute of Technology, which currently lacks high-throughput nanopatterning capability. The acquisition of the requested system will therefore significantly enhance the efforts of currently funded research projects, while expanding the scope of emerging research activities. Broader Impacts The interdisciplinary research projects will provide the requested system a consistently growing user base, fostering a multidisciplinary research-intense learning environment in nanotechnology. This acquisition will also directly support educational initiatives underway at Stevens. The requested system will be highlighted in an ongoing NUE project, an innovative multimedia/web-based learning material development program seeking to incorporate both nanotechnology education and academic research into the undergraduate curriculum. Research enabled by the requested system will also be incorporated into graduate and undergraduate classes being developed and taught at Stevens. In this manner, the proposed acquisition will further foster integration of research and education through the educational initiatives and research activities at Stevens and our local collaborators.

本研究的目的是获得一个Nanonex 1000纳米压印光刻系统，具有高分辨率（~10 nm）和高吞吐量（~60秒）的能力，用于低维纳米研究和教育计划。该方法是利用所要求的系统在纳米技术的多学科研究项目，并支持史蒂文斯正在进行的教育活动。所要求的系统增强的制造能力将直接影响跨越许多新兴微/纳米技术和科学领域的各种研究项目。所要求的系统是一个国家的最先进的纳米光刻工具，将显着提高正在进行的研究项目集中在多用户微器件实验室在史蒂文斯理工学院，目前缺乏高通量纳米图案化能力。因此，购置所要求的系统将大大加强目前供资的研究项目的工作，同时扩大新出现的研究活动的范围。更广泛的影响跨学科的研究项目将提供所要求的系统不断增长的用户群，促进纳米技术的多学科研究密集的学习环境。此次收购还将直接支持史蒂文斯正在进行的教育计划。所要求的系统将在一个正在进行的NUE项目，一个创新的多媒体/基于网络的学习材料开发计划，寻求将纳米技术教育和学术研究纳入本科课程突出。所要求的系统启用的研究也将被纳入正在开发和史蒂文斯教授的研究生和本科生课程。通过这种方式，拟议的收购将通过史蒂文斯和我们当地合作者的教育计划和研究活动进一步促进研究和教育的整合。