MRI: Acquisition of ICP-RIE Capability at Texas State University - San Marcos

德克萨斯州立大学圣马科斯分校正在积极开发一个新的材料科学、工程和商业化（MSEC）项目，该项目基于生物系、化学/生物化学系、工程技术系、物理系和英格拉姆工程学院之间的合作。该磁共振成像采集感应耦合等离子体反应离子蚀刻系统的目的是通过提供满足大学目标所需的性能和工艺一致性来提高大学的现有能力。我们非常重视跨学科研究，这是MSEC项目的核心。智力上的优点是显著地有利于正在进行的研究项目，包括微电子设备、微致动器和纳米/生物医学应用的发展。因此，新的服务设施有望成为加强目前跨学科研究伙伴关系的催化剂。此外，所获得的多功能系统为大学研究界、工业和政府合作者提供了广泛的能力。将支持该系统，并通过发展用户-大学-国家伙伴关系来管理共享资源，维持其研究和教育的效力。这个项目的广泛影响是作为德克萨斯州立大学的主要共享资源。公共和私营部门在MSEC的活动越来越多。此外，大学还会将该系统的使用整合到学生身上。课程、顶点课程和研究经历。总而言之，该系统对于材料科学和工程领域当前研究的进步和发展至关重要，该系统将德克萨斯州立大学的学术、联邦政府和工业实验室联系起来，解决安全、健康、能源和环境领域的社会问题。

Texas State University-San Marcos is aggressively developing a new Materials Science, Engineering, and Commercialization (MSEC) Program based on collaboration amongst the Departments of Biology, Chemistry/Biochemistry, Engineering Technology, Physics, and the Ingram School of Engineering. The objective of this MRI acquisition of an inductively coupled plasma-reactive ion etching system is to enhance the present capability of the university by providing performance and process consistency necessary to meet the goals of the university?s strong emphasis on interdisciplinary research central to the MSEC program. The intellectual merit is in significantly benefitting ongoing research programs including the development of microelectronic devices, micro-actuators, and nano/biomedical applications. Hence, the new service facility is expected to be a catalyst that strengthens current interdisciplinary research partnerships. Furthermore, the multifunctional system being acquired offers a broad capability to the university research community and industrial and government collaborators. The system will be supported, and its effectiveness for research and education sustained, through the development of a user-university-state partnership for stewardship of shared resources. The broad impact of this program is to serve as a primary shared resource for Texas State University?s growing public and private sector activity in MSEC. In addition, the university will integrate the use of the system into the students? course, capstone, and research experiences. In summary, the system is essential to the advancement and growth of current research in materials science and engineering linking academic, federal government, and industry labs at Texas State addressing areas of societal concern in the security, health, energy and environmental sectors.