MRI: Acquisition of ICP-RIE Capability at Texas State University - San Marcos

MRI：德克萨斯州立大学圣马科斯分校获得 ICP-RIE 能力

• 批准号: 1126754
• 负责人: In-Hyouk Song
• 金额: $ 48.66万
• 依托单位: Texas State University - San Marcos
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2014-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1126754&HistoricalAwards=false
• 关键词: MRI; Acquisition; ICP; RIE; Capability

Texas State University-San Marcos is aggressively developing a new Materials Science, Engineering, and Commercialization (MSEC) Program based on collaboration amongst the Departments of Biology, Chemistry/Biochemistry, Engineering Technology, Physics, and the Ingram School of Engineering. The objective of this MRI acquisition of an inductively coupled plasma-reactive ion etching system is to enhance the present capability of the university by providing performance and process consistency necessary to meet the goals of the university?s strong emphasis on interdisciplinary research central to the MSEC program. The intellectual merit is in significantly benefitting ongoing research programs including the development of microelectronic devices, micro-actuators, and nano/biomedical applications. Hence, the new service facility is expected to be a catalyst that strengthens current interdisciplinary research partnerships. Furthermore, the multifunctional system being acquired offers a broad capability to the university research community and industrial and government collaborators. The system will be supported, and its effectiveness for research and education sustained, through the development of a user-university-state partnership for stewardship of shared resources. The broad impact of this program is to serve as a primary shared resource for Texas State University?s growing public and private sector activity in MSEC. In addition, the university will integrate the use of the system into the students? course, capstone, and research experiences. In summary, the system is essential to the advancement and growth of current research in materials science and engineering linking academic, federal government, and industry labs at Texas State addressing areas of societal concern in the security, health, energy and environmental sectors.

德克萨斯州立大学圣马科斯分校正在积极开发一个新的材料科学，工程和商业化（MSEC）计划，该计划基于生物学，化学/生物化学，工程技术，物理学和工程英格拉姆学院之间的合作。的目的，这磁共振成像收购的电感耦合等离子体反应离子蚀刻系统是提高目前的能力，通过提供必要的性能和工艺的一致性，以满足大学的目标？的跨学科研究中心的MSEC计划的重点。其智力价值是显着受益于正在进行的研究计划，包括微电子器件，微致动器和纳米/生物医学应用的发展。因此，新的服务设施预计将成为加强目前跨学科研究伙伴关系的催化剂。此外，正在收购的多功能系统为大学研究界以及工业和政府合作者提供了广泛的能力。将通过发展用户-大学-国家伙伴关系管理共享资源，支持该系统，并保持其研究和教育的有效性。该计划的广泛影响是作为德克萨斯州立大学的主要共享资源？在MSEC中，公共和私营部门的活动日益增加。此外，大学将把系统的使用整合到学生中？课程、顶点和研究经验。总之，该系统是必不可少的进步和增长，目前的研究在材料科学和工程连接学术，联邦政府和工业实验室在得克萨斯州解决安全，健康，能源和环境部门的社会关注的领域。