MRI: Acquisition of a Mask Aligner for Micro/Nano-Fabrication Research at Arkansas State University

MRI：阿肯色州立大学购买用于微/纳米制造研究的掩模对准器

• 批准号: 1229404
• 负责人: Ilwoo Seok
• 金额: $ 29.86万
• 依托单位: Arkansas State University Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-09-01 至 2015-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1229404&HistoricalAwards=false
• 关键词: MRI; Acquisition; Mask; Aligner; Micro

This Major Research Instrumentation (MRI) award supports the acquisition of a mask aligner for micro/nano-fabrication. The instrument will support ongoing and future micro/nano-scale fabrication-based research and education by multiple research groups in engineering, physics, chemistry, molecular biology, and food science at Arkansas State University-Jonesboro (ASU-J). The instrument will be used to support research focused on energy harvesting devices, sensors and actuators, induced electromagnetic fields onto photonic matter, and detection/manipulation of cells and molecular biology. Research in renewable energy with micro/nano-fabrication will use this system to allow the study of energy harvesting/efficient devices ? concentrated photovoltaic, thermoelectric, and photonic displays and crystals ? for enhanced in energy conversion efficiency and cost-effectiveness. Research will also use this equipment to study the effects of micro-patterned structures on the cell and molecular biology. Additionally, the requested mask aligner will be used frequently for nano-imprinting lithography in more in-depth nano-scaled atomic applications.This instrument will expand and enhance research projects and opportunities within the Center for Efficient and Sustainable Use of Resources (CESUR) at ASU-J and provide multi-disciplinary research experiences for faculty and graduate and undergraduate students in engineering, physics, chemistry, molecular biology, and food science programs. Instruction will be impacted via the development of new activities in courses that make use of the instrument. Students enrolled in the newly developed Master of Science in Engineering (MSEng) program on ASU-J campus, will utilize this equipment frequently for both R&D and instructional purposes for micro/nano-scaled device development. Enhanced research opportunities will also increase the University?s effort to recruit and retain students and faculty from traditionally underrepresented groups.

这一重大研究仪器(MRI)奖支持收购用于微/纳米制造的掩模对准器。该仪器将支持阿肯色州立大学琼斯伯勒分校(ASU-J)工程、物理、化学、分子生物学和食品科学领域的多个研究小组正在进行的和未来基于微/纳米制造的研究和教育。该仪器将用于支持专注于能量采集设备、传感器和致动器、光子物质上的感应电磁场以及细胞和分子生物学的检测/操纵的研究。微/纳米制造的可再生能源研究将使用该系统来研究能源收集/高效设备？集中式光伏、热电和光子显示器和晶体？以提高能源转换效率和成本效益。研究人员还将使用该设备研究微图案结构对细胞和分子生物学的影响。此外，所需的掩模对准器将经常用于更深入的纳米级原子应用中的纳米压印光刻。该仪器将扩大和增强亚利桑那州立大学资源高效和可持续利用中心(CEUR)内的研究项目和机会，并为工程、物理、化学、分子生物学和食品科学项目的教职员工和研究生和本科生提供多学科的研究经验。在利用该工具的课程中开展新的活动将对教学产生影响。注册了亚利桑那州立大学J校区新开发的工程科学硕士(MSEng)项目的学生，将经常使用这种设备进行研发和微/纳米设备开发的教学目的。更多的研究机会也将增加S大学从传统上代表性较低的群体中招收和留住学生和教师的努力。