ARI-MA: Fabrication of Solid-State Large Area Thermal Neutron Detectors at a Low Cost

ARI-MA：低成本制造固态大面积热中子探测器

• 批准号: 1348269
• 负责人: Yaron Danon
• 金额: $ 29.1万
• 依托单位: Rensselaer Polytechnic Institute
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-10-01 至 2015-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1348269&HistoricalAwards=false
• 关键词: ARI; MA; Fabrication; Solid; State

1348269 (Danon). Detection of nuclear materials such as U and Pu is often accomplished by utilizing their natural or induced neutron emission. Such systems typically use thermal neutron detectors inside a plastic moderator. In order to achieve high detection efficiency He-3 or BF-3 filled thermal neutron detectors are utilized; these detectors require high voltage bias for operation, which complicates the system when many detectors are used in one system. In addition He-3 detectors are bulky and do not fit well for portable applications. A better type of detector would be an inexpensive solid-state detector that can be massively produced like any other computer chips. If such a detector does not require a bias for operation, could be produced with small or large surface area, and has a low gamma sensitivity and fast response, it will be the ideal low-cost detector for future neutron detection systems. Such detector was developed at Rensselaer Polytechnic Institute with demonstrated area of 8 cm2 (with single commercial preamplifier) and measured efficiency of 30% for 0.0253 eV neutrons. This project focuses on improvements of the fabrication process to utilize wet etching of Si (110), electrophoretic deposition of boron nanoparticles, and a design of compact integrated electronic readout. These improvements will reduce the production cost significantly, while improving the performance due to deeper silicon etching. The end result is targeted to be a low cost solid-state thermal neutron detector that is suitable and ready for use in many DNDO related applications. Intellectual merit includes development of new low-cost boron nanoparticle deposition methods to replace the LPCVD process. It also includes wet etching method with large aspect ratio; a low cost alternative to currently used Bosch process. In order to significantly improve the overall efficiency further, multiple device wafers are stacked together before interfacing with the compact integrated electronic readout. Additional contribution is education of students in the area of nuclear detector development that includes radiation interaction with matter and solid- state detector fabrication. The broader impact of this proposal is the development of a novel type of high efficiency self-powered solid-state neutron detector with a low production cost. The development in device fabrication will result in a new type of charged particle detectors based on solar-cell technology. In addition to homeland security applications, these technologies have applications in neutron dosimetry and monitoring used in the nuclear industry and research.

1348269（Danon）。对铀和钚等核材料的探测通常是利用它们的自然或诱导中子发射来完成的。这种系统通常使用塑料减速器内的热中子探测器。为了实现高检测效率，使用填充He-3或BF-3的热中子检测器;这些检测器需要高电压偏置用于操作，当在一个系统中使用许多检测器时，这使系统复杂化。此外，He-3探测器体积庞大，不适合便携式应用。一种更好的探测器是一种廉价的固态探测器，它可以像任何其他计算机芯片一样大规模生产。如果这种探测器不需要偏置操作，可以用小或大的表面积生产，并且具有低伽马灵敏度和快速响应，它将是未来中子探测系统的理想低成本探测器。这种探测器是在伦斯勒理工学院开发的，其演示面积为8平方厘米（使用单个商用探测器），对0.0253 eV中子的测量效率为30%。本计画的重点是改善制程以利用矽（110）的湿蚀刻、奈米硼粒子的电泳沈积，以及设计一种小型整合式电子读取器。这些改进将显著降低生产成本，同时由于更深的硅蚀刻而提高性能。最终结果的目标是一个低成本的固态热中子探测器，是合适的，并准备在许多DNDO相关的应用。知识价值包括开发新的低成本硼纳米颗粒沉积方法，以取代LPCVD工艺。它还包括具有大纵横比的湿法蚀刻方法;目前使用的Bosch工艺的低成本替代品。为了进一步显著提高整体效率，多个器件晶片在与紧凑型集成电子读出器接口之前堆叠在一起。另外的贡献是在核探测器开发领域对学生进行教育，包括辐射与物质的相互作用和固态探测器的制造。这一提议的更广泛影响是开发一种新型的高效自供电固态中子探测器，其生产成本低。器件制造的发展将导致基于太阳能电池技术的新型带电粒子探测器。除了国土安全应用外，这些技术还应用于核工业和研究中使用的中子剂量测定和监测。