Magnetic levitation and transport of micro objects using solenoidal microcoil arrays

我们建议在高效使用IMTEK微致动器实验室最近开发的自动焊丝机的基础上，利用强大而通用的先进线圈缠绕技术。我们解决了四个主要目标：•基于3D螺线管微线圈的稳定，主动，非接触电磁微轴承系统的实现。施加在定子线圈上的高频交流电在转子中产生电流，该电流与励磁电流相互作用产生斥力，从而使转子悬浮。额外的线圈提供横向约束，本质上作为磁性轴承。•将我们的线键合线圈技术扩展到使用隔离铜线和非螺线形3D线圈几何形状。•实现基于电磁微轴承的3自由度磁感应微机。•在项目的第二阶段，提出了第四个自由度-旋转，从而尝试实现旋转微机械。列出的目标旨在消除摩擦和磨损-限制微机械性能的最重要因素。

We propose to exploit the robust and versatile state of the art coil winding technology basedon the highly efficient use of an automatic wire bonder which has been developed recently at IMTEK’sLaboratory for Microactuators. We address four main objectives:• Realization of a stabilized, active, contactless electromagnetic microbearing system based on 3D solenoidal microcoils. A high-frequency alternating current applied to the stator coils induces a current in the rotor, which interacts with the excitation current to produce repulsive force thus levitating the rotor. Additional coils provide lateral constraint, essentially acting as a magnetic bearing.• To extend our wire bonding coil technology to the use of isolated copper wire and nonsolenoidal 3D coil geometries.• To implement a 3 degrees of freedom (DoF) magnetic induction micromachine based on the electromagnetic microbearing.• In a second phase of the project, the 4th DoF – rotation – is proposed, thus attempting to realize a rotary micromachine.The listed goals aim at the elimination of friction and wear – the most important factors limiting theperformance of micromachines.