SBIR Phase I: High Resolution Terahertz Video Camera for People Screening and Medical Imaging

这项小企业创新研究（SBIR）第一阶段项目的更广泛/商业影响是推进用于包括安全和医疗筛查在内的应用的摄像机。安全检查和医疗成像应用都需要实用的摄像机解决方案，可以提供高分辨率和实时视频帧率。2017年，机场旅客安检市场估计为20亿美元，医疗成像技术市场为340亿美元。拟议的项目将推动一种比其他形式的辐射更安全的成像技术的发展。这个项目的智力价值在于探索太赫兹（THz）成像传感器阵列的转换，利用平板工业中已有的工艺在大型基板上进行单片生产。太赫兹成像提供额外的安全性，因为它是非电离的。长波转换成比可见光或红外传感器阵列更大的传感器像素。高分辨率所需的大型阵列将需要物理上较大的传感器阵列，这些传感器阵列非常适合显示玻璃制造代工厂中可用的大板尺寸。使用这种制造技术制造合适的太赫兹传感器结构将需要工艺适应以及针对太赫兹应用的创新器件设计。该项目将推进由256x256像素阵列组成的相机核心的设计和开发，该阵列可以以10-30 Hz的帧更新速率运行。该项目还将开发与安全和医疗应用相关的成像所需的光学器件。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The broader/commercial impact of this Small Business Innovation Research (SBIR) Phase I project is to advance a camera for applications including security and medical screening. The security screening and medical imaging applications both call for practical camera solutions that can offer both high resolution and real-time video frame rates. The airport passenger screening market was estimated at $2 B in 2017, and medical imaging technologies represents a $34 B market. The proposed project will advance the development of an imaging technology that is safer than other forms of radiation. The intellectual merit of this project is to explore translation of a Terahertz (THz) imaging sensor array, to be monolithically produced on a large substrate using processes already available in the flat panel industry. THz imaging offers extra safety as it is non-ionizing. The long wavelengths translate to larger sensor pixels than those of visible or infrared sensor arrays. Large arrays needed for high resolution will require physically large sensor arrays that are ideally suited for the large plate sizes available in display glass fabrication foundries. Making suitable THz sensor structures using such a manufacturing technique will require process adaptation as well as innovative device designs for THz applications. This project will advance the design and development of a camera core consisting of a 256x256 pixel array that can operate at a 10-30 Hz frame update rate. The project will also develop the optics necessary for imaging associated with security and medical applications.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.