STTR Phase I: Development of resonators on high temperature piezoelectric materials for harsh environment sensor and oscillator applications

STTR 第一阶段：开发用于恶劣环境传感器和振荡器应用的高温压电材料谐振器

• 批准号: 2014804
• 负责人: Kushal Bhattacharjee
• 金额: $ 22.5万
• 依托单位: Kampanics, L.L.C.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-05-15 至 2022-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2014804&HistoricalAwards=false
• 关键词: STTR; Phase; Development; resonators; temperature

The broader impact/commercial potential of this Small Business Technology Transfer (STTR) Phase I project is to address the need for accurate devices capable of operating in extreme environments exceeding 250 °C. Many sensors have key components made of quartz, known for its high sensitivity, accuracy, and stability; but it cannot operate at temperatures exceeding 250 °C. The applications requiring sensitive components operating at these high temperatures include interplanetary spacecraft, nuclear reactors, deep drilling, enhanced geothermal systems, and hypersonic aircrafts and missiles. The proposed project will develop new sensors using advanced material technologies. This Small Business Technology Transfer (STTR) Phase I project aims to develop a novel resonator on piezoelectric materials optimized for performance at high temperature and pressure. The proposed dual-mode resonators are expected to exhibit much higher stability and accuracy. They are also expected to have significantly less need for systemic recalibration. The three main objectives in this project are to optimize the cut angles of the piezoelectric material; develop wafer-level fabrication processes, for size and cost reduction; and to develop a wafer bonding process for eventual wafer-level packaging of the resonators. The effort address translation challenges in device structure, synthesis, modeling and optimization, wafer level fabrication and packaging, to make highly sensitive, accurate, small footprint, low-cost resonators.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该小型企业技术转移（STTR）I期项目的更广泛的影响/商业潜力是满足能够在超过250°C的极端环境中运行的准确设备的需求。许多传感器具有由石英制成的关键组件，以其高灵敏度，准确性和稳定性而闻名。但是它不能在超过250°C的温度下运行。需要在这些高温下运行的敏感组件的应用包括星际航天器，核反应堆，深钻，增强的地热系统以及高超音速飞机和导弹。拟议的项目将使用先进的材料技术开发新的传感器。这个小型企业技术转移（STTR）I阶段项目旨在开发一种新型的谐振器，以在高温和压力下进行性能优化的压电材料。提出的双模式谐振器有望耗尽更高的稳定性和准确性。预计他们对全身重新校准的需求大大减少。该项目的三个主要目标是优化压电材料的切割角。开发摇摆级的制造工艺，以降低尺寸和成本；并为最终的摇摆级包装开发摇动粘结过程。这项工作解决了设备结构，合成，建模和优化，晶圆级制造和包装方面的翻译挑战，以使高度敏感，准确，小的足迹，低成本的谐振器。该奖项反映了NSF的法定任务，并被认为是通过使用基金会的知识分子和更广泛的影响来审查Criteria来通过评估来通过评估来获得支持的。