極低温THz近接場顕微鏡を用いた微小回路エネルギー散逸の観察

使用低温太赫兹近场显微镜观察微电路能量耗散

• 批准号: 21K04874
• 负责人: 林 冠廷
• 金额: $ 2.58万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2021
• 资助国家: 日本
• 起止时间: 2021-04-01 至 2024-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21K04874/
• 关键词: 近接場光学顕微技術; THz顕微技術; 近接場顕微技術; THz光学系; ナノサーモグラフィー

To improve the spatial resolution of far-field (FF) images of low-temperature THz s-SNOM, I’ve designed a new confocal optics. The new design uses germanium (Ge) meniscus lens design for objective and relay lens to reduce spherical aberration. The Ge meniscus objective has a numerical aperture of 0.35 and a working distance of 12 mm. A pinhole of 60 μm diameter is placed between the objective and the relay lens. To check the focal spot size of the confocal optics, the LWIR FF thermal signals are measured at the boundary between Au and SiO2. The spatial resolution of the FF signals is estimated to be ~70 μm, better than the 110 μm obtained from the single lens optics. Further, to reduce the acquisition time, the tip-modulation method is applied to reduce the extra background radiation induced by the sample-height modulation method. With these two improvements, the acquisition time of near-field (NF) detection in the low-temperature THz s-SNOM is improved to 3 s from 10 s.An NF signal is successfully detected on the NiCr/SiO2 sample with a 3 s integration time by using. According to the NF decay data, the NF signals observed on the NiCr can be explained by the electromagnetic evanescent fields induced by the thermal random motion of the conduction electrons.The submicron-structure metallic and graphene device has been fabricated by e-beam lithography. The current-induced NF is detected for the first trial by using the room-temperature s-SNOM.

为了提高低温太赫兹s-SNOM远场图像的空间分辨率，设计了一种新型共聚焦光学器件。新设计采用锗（Ge）半月板透镜设计的物镜和中继透镜，以减少球差。Ge半月板物镜的数值孔径为0.35，工作距离为12 mm。物镜与中继镜之间有直径60 μm的针孔。为了验证共聚焦光学的焦斑大小，在Au和SiO2之间的边界处测量了LWIR FF热信号。估计FF信号的空间分辨率为~70 μm，优于单透镜光学获得的110 μm。此外，为了减少采集时间，采用尖端调制方法来减少采样高度调制方法引起的额外背景辐射。通过这两项改进，低温太赫兹s- snom近场探测的采集时间从10 s缩短到3 s。在积分时间为3 s的NiCr/SiO2样品上成功检测到NF信号。根据NF衰减数据，在NiCr上观测到的NF信号可以用传导电子的热随机运动所产生的电磁场来解释。采用电子束光刻技术制备了亚微米结构的金属和石墨烯器件。在第一次试验中，使用室温s-SNOM检测电流诱导的NF。

项目成果

THz spectroscopic near-field measurement for nanoscale thermal evanescent waves

纳米级热倏逝波的太赫兹光谱近场测量

• 发表时间: 2021
• 作者: Ryoko Sakuma;Kuan-Ting Lin;Sunmi Kim;Fuminobu Kimura;Yusuke Kajihara
• 通讯作者: Yusuke Kajihara

低温THz近接場顕微鏡による金属膜上の熱励起エバネッセント波の観察

使用低温太赫兹近场显微镜观察金属薄膜上的热激发倏逝波

• 发表时间: 2021
• 作者: Abozeed Amina A.;Gorbunov Denis I.;Kadono Toshiharu;Kanai-Nakata Yuina;Yamagami Kohei;Fujiwara Hidenori;Sekiyama Akira;Higashiya Atsushi;Yamasaki Atsushi;Tamasaku Kenji;Yabashi Makina;Ishikawa Tetsuya;Wada Hirofumi;Andreev Alexander V.;Imada Shin;林冠廷，翁銭春，金鮮美，小宮山進，梶原優介
• 通讯作者: 林冠廷，翁銭春，金鮮美，小宮山進，梶原優介

Long-Infrared Passive Near-field Spectroscopic Imaging

长红外被动近场光谱成像

• 发表时间: 2021
• 作者: Ryoko Sakuma;Kuan-Ting Lin;Sunmi Kim;Fuminobu Kimura;Yusuke Kajihara
• 通讯作者: Yusuke Kajihara

熱励起エバネッセント波の近接場分光イメージング

热激发倏逝波的近场光谱成像

• 发表时间: 2021
• 作者: Shen Jiabin;Jia Shujing;Shi Nannan;Ge Qingqin;Gotoh Tamihiro;Lv Shilong;Liu Qi;Dronskowski Richard;Elliott Stephen R.;Song Zhitang;Zhu Min;佐久間涼子，林冠廷，金鮮美，木村文信 ，梶原優介
• 通讯作者: 佐久間涼子，林冠廷，金鮮美，木村文信 ，梶原優介

Nanoscale probing of thermally excited evanescent waves on an electrically stimulated graphene with thermal near-field microscopy

使用热近场显微镜对电刺激石墨烯上的热激发倏逝波进行纳米级探测

• 发表时间: 2021
• 作者: Masaki Shinomiya;Zhang Hao;Kuan-Ting Lin;Yusuke Kajihara
• 通讯作者: Yusuke Kajihara