Studies to improve conversion efficiency of thin film organic photovoltaic cells via development of novel filling process of organic semiconductor materials

提出了一种薄膜有机光伏电池（OPVC）的“理想”结构，以实现与硅基电池相当的高能量转换效率，其中两种类型的有机半导体以有序方式交叉。在本研究中，我运用自己研发的温度驱动超临界流体沉积（TSFD）技术，将有机半导体完全填充到纳米尺度的三维特征上。在对沉积行为对衬底温度、流速等的依赖性进行基础研究后，成功地将有机光伏材料蒽填充到Si沟槽（1 μ m宽、10 μ m深）上。

An "ideal" structure for thin film organic photovoltaic cell (OPVC) is proposed to achieve high energy conversion efficiency comparable with silicon-base cells, in which two types of organic semiconductors are interdigitated in an ordered fashion. In this research, I applied temperature-driven supercritical fluid deposition (TSFD), which has been developed by myself, to make a complete filling of organic semiconductors to nano-scale 3-dimensional features. After the fundamental studies including dependence of deposition behavior on substrate temperature, flow rate, etc., an organic photovoltaic material, anthracene was successfully filled onto Si trenches (1-um-width and 10-um-depth).