A Novel Pumping Mechanism of Using Ultrasound Induced Pressure and Cavitations for Micro-Pump Development

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We have developed a new pumping method of using ultrasound induced pressure differences and cavitations. An ultrasonic vibrating surface is fabricated at the bottom of a water tank. Standing waves of half wavelength are formed between the vibrating surface and the water surface. A vertical rising pipe of small inner diameter of 0.37mm is inserted in the water in a depth of 1/4 wavelength. Micro-bubble cloud is formed around the rising pipe inlet, which suppresses the negative pressure in the vibrating cycle and results in continuous pumping of water. The mechanisms and fundamental characteristics have been explored by experimental investigations. A pumping pressure of over 23kPa and a maximum flow rate of 10 ml/min were achieved. A prototype of micro-pump has been developed.