Entwicklung und Herstellung von direktabgeschiedener Sensorik auf Baugruppen einer Bohrlochgarnitur (T14#)

在过去几年中，对测量各种非电气和机械测量的机器的需求显着增加。通过监测正常、临界或高应力机器部件的运行状态，可以实现系统性能和寿命的改进。这就是为什么新的传感器和传感器制造技术的发展在工业4.0和数据采集的背景下发挥重要作用的原因。微生产技术研究所提出了一种新方法，可以直接将薄传感器系统沉积在任意尺寸的组件上，而不需要任何厚的中间层，如胶水或载体基板。为了实现直接沉积，开发了一种新的涂层系统。通过使用溅射沉积各种类型的传感器，如应变片、温度传感器或磁场传感器，可以沉积具有出色的层均匀性、层性能和纯度。通过直接沉积，传感层与元件表面之间的距离减小。此外，降低了整体层厚和厚中间层（如胶水）的影响，提高了灵敏度。结合将传感器放置在任意尺寸的组件上的能力（真空室没有尺寸限制，因为组件是腔室的一侧），传感器系统可以用于机器内的新位置和新组件上。该转移项目的总体目标是将653合作研究中心的子项目S1“模块化多功能微型传感器”的基础研究成果转化为实际用例。因此，合作伙伴贝克休斯INTEQ （BHI）的井底钻具组合的子组件，例如用于地热应用的组件，应该通过使用新的涂层系统配备薄的、高灵敏度的应变片。这种应变计可以测量钻井组件上的扭矩、重量和弯矩。对BHI的广泛调查揭示了商用应变片的适用性差。主要缺点是传感器整体厚度高，胶水和载体基板，商用应变片传感器布局的限制，最大工作温度范围和足够的磨损保护的限制。

The demand on measuring a variety of non-electrical and mechanical measurands in machines has increased significantly during the last years. By monitoring the operation status of normal, critical or highly stressed machine components and parts, an improvement of system performance and lifetime can be achieved. That is the reason why the development of new sensors and sensor manufacturing technologies play an important role in the context of industry 4.0 and data acquisition.At the Institute of Micro Production Technology a new approach has been made which allows to directly deposit thin sensor systems on components of arbitrary size without any thick intermediate layers, such as glue or carrier substrates. For enabling direct deposition, a new coating system has been developed. By using sputter deposition a variety of sensor types, such as strain gauges, temperature sensors or magnetic field sensors, can be deposited in combination with outstanding layer homogeneity, layer properties and purity. By using direct deposition the distance between the sensing layer and the surface of a component is reduced. Moreover, the overall layer thickness and the influence of thick intermediate layers (e.g. glue) is reduced and the sensitivity increased. In combination with the ability to deposit sensors on components of arbitrary size (no size limitations of vacuum chamber as component is one side of chamber), sensor systems can be used at new positions and on new components within machines.The overall aim of this transfer project is the conversion of the fundamental research results of the subproject S1 „Modular, Multifunctional Micro Sensors“ of the Collaborative Research Centre 653 to a practical use case. For this reason, subcomponents of drilling bottom hole assemblies, that are used for instance for geothermal energy applications, of the cooperation partner Baker Hughes INTEQ (BHI) should be equipped with thin, highly sensitive strain gauges by using the new coating system. Such strain gauges enable the measurement of torque, weight and bending moment on the drilling assemblies. Extensive investigations of BHI revealed the poor applicability of commercial strain gauges. The main disadvantages are the high overall sensor thickness, glue and carrier substrates, limitations concerning the sensor layout of commercial available strain gauges and limitations concerning the maximum operable temperature range and adequate wear protection.