He/Ga-scanning microscopy system with SEM

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The Röntgen-Center for Complex Material Systems (RCCM) has been founded in July 2006 by scientists of the faculties of Physics and Astronomy, Chemistry and Pharmacy, and Biology. Via its `Joint Analytical Laboratory´ it provides access to cutting edge tools for material analysis. Nanostructures of high quality are playing a more and more decisive role for the fields of physics, chemistry and life sciences that converge at the nanoscale. Here we request funding for a facility that tightly integrates both high-end multiscale micro- and nanofabrication and preparation as well as analysis of nanostructures by means of correlative microscopy. Both capabilities need to work hand in hand to guarantee best performance of nanostructures and short optimization cycles. We therefore intend to realize a unique combination of both aspects by combining a multi-ion focused ion-beam milling device (Orion Nanofab, Zeiss) with an ultra-high-resolution field-emission scanning electron microscope (Merlin, Zeiss). Both functionalities so far cannot be integrated in a single machine, however, correlative microscopy approaches and direct spatial vicinity will guarantee a seamless combination of both instruments. In particular, extremely fine nanostructures fabricated by He-ion milling can be characterized by high-end SEM immediately and adapted if necessary. The system will be open to all RCCM members. The list of applicants represents a balanced cross section of RCCM activities. Intended applications include fabrication and analysis of high-end single crystal plasmonic nanostructures, structuring and imaging of 2D semiconductors, carbon nanotubes and self-organized functional organic materials, as well as high-resolution imaging of biological organisms. Further applications are expected to arise in the field of topological insulators within the SFB 1170.