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Test construction of a large current low voltage CW ion source for ion implantation

离子注入用大电流低压连续波离子源试验搭建

基本信息

批准号：
60850068
负责人：
YOSHIKAWA Kiyoshi
金额：
$ 4.8万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1985
资助国家：
日本
起止时间：
1985 至 1986
项目状态：
已结题

项目摘要

The performance characteristics of the newly constructed Hall accelerator for low voltage CW operation (HALOC) were investigated. Hydrogen gas pressure, magnetic field, and drain current of the power supply determine the HALOC performance. Effects on the extracted hydrogen beam current, energy profiles, V-I characteristics, energy efficiency and so on were investigated in the experiments. Parameter ranges were from 0.93 to 10.6 (Pa) for pressure, 0 to 190 (Gauss) for magnetic field, and 0.1 to 3.0 (A) for drain current. The beam was extracted by appling positive voltage to intermediate electrodes while the anode and two cathodes were grounded. A beam of about 3 A could be extracted successfully for an acceleration voltage of 600 V, for several hours. Particularly, a very stable beam could be extracted by using a Baratron pressure control system. The ignition of the beam could be achieved merely by increasing the pressure to about 0.1 Torr without the use of filaments. Efficiency of current extraction ranges form 70 to 90%. The analyses of the energy profiles by means of a multi-grid analyzer show a very sharp peak around 300 V for an acceleration voltage of 600 V, and the ratio of half width to the peak voltage is less than 0.1. The average energy obtained from the energy profile ranges from 260 to 360 V, depending on the operation conditions, resulting in an energy efficiency between 30 to 70 %. From the above results, It can be seen that the HALOC could have successfully generated a large hydrogen beam current of 3 A, and very stably with a very sharp peak in the energy profile, and continuously for several hours. (So far total running time is about 100 hours.) The 30-70 % energy efficiency meets the requirements posed for HALOC. Further research to further decrease the beam energy, say, down to 100 V, and the extraction of other gas ions (oxygen, in particular) are needed.

研究了新型低电压连续工作霍尔加速器（HALOC）的性能特性。HALOC的性能取决于氢气压力、磁场和电源的漏电流。实验研究了影响抽氢束流、能量分布、伏安特性、能量效率等因素。参数范围为0.93至10.6（Pa）的压力，0至190（高斯）的磁场，和0.1至3.0（A）的漏极电流。通过在阳极和两个阴极接地的同时向中间电极施加正电压来提取束流。对于600 V的加速电压，可以成功地提取约3 A的束数小时。特别地，可以通过使用Baratron压力控制系统来提取非常稳定的束。仅通过将压力增加到约0.1托而不使用灯丝就可以实现束的点燃。电流提取效率范围为70 - 90%。借助于多栅极分析器对能量分布的分析示出了对于600 V的加速电压在300 V附近的非常尖锐的峰，并且半宽度与峰电压的比率小于0.1。从能量分布图获得的平均能量范围为260至360 V，取决于操作条件，导致能量效率在30至70%之间。从以上结果可以看出，HALOC可以成功地产生3A的大氢束流，并且非常稳定，能量分布中具有非常尖锐的峰值，并且连续几个小时。(So总运行时间约为100小时）。30- 70%的能源效率满足了对HALOC提出的要求。需要进一步研究以进一步降低射束能量，例如，降低到100 V，以及提取其他气体离子（特别是氧气）。