Development of an ultra-precision diamond facing lathe using intelligent machine elements

超精密车削的研究与开发是在软质金属镜面加工的需求下启动的。车削的原理是将机床的高精度转录到精加工表面上。本课题将目前尚未使用的有效机床元件应用到精密机床中，以提高机床精度。结果表明：(1)利用所研制的车床在车削表面观察到0.2 m的波动，这是由气轴承主轴和气轴承滑块的误差运动引起的。(2)对直线电机在车床上的应用研究表明，采用低摩擦导轨可获得良好的直线度，但由于导轨刚度低，会产生速度偏差。(3)氟碳聚合物吸力强，吸力过程中抗变形能力强，使用吸盘的铝盘系数高，由于杨氏比高，具有良好的半径直线度和良好的外直线度。(4)以激光束直线度为基准的二维直线度测量方法具有分辨率高、范围宽的特点，但由于激光束源的不稳定性和激光路径上的空气湍流，会导致输出电压的波动

The research and development on ultra-precision turning is activated under the demand for mirror finishing of soft metals. The principle of the turning is to transcribe the high accuracy of machine tools to the finishing surface. In thes project the effective machine elements which are not currently in use are applied into the precision machine tools in order to improve the accuracy. the results are summarized as follows:(1) The 0.2 m of waveness was observed on the turned surface using the developed lathe, which was generated due to the error motions of the air bearing spindle and the air bearing slide.(2) The investigation on the application of a linear motor to the lathe indicated that the good straightness was obtained with the low-friction guide but the velocity deviation occurred due to the low stiffness.(3) Fluorocarbon polymers had a good madhinabiliyt, a high resistance against the deformation during the suction, and a high coefficient of Aluminum discd using the chuck indicated a good radius straightness and a good outer straightness due to the high Young's ration.(4) The two-dimensional straightness measurement method using the straightness of the laser beam as the reference had a high resoultion and wide range but the xdattering of the output voltage was observed due to the unstability of the source of laser beam and the air turbulence along the laser path