Development of an ultra-precision diamond facing lathe using intelligent machine elements

使用智能机器元件开发超精密金刚石端面车床

• 批准号: 62850024
• 负责人: IKENO Jun'ichi
• 金额: $ 5.95万
• 依托单位: Institute of Industrial Science, University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1987
• 资助国家: 日本
• 起止时间: 1987 至 1988
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-62850024/
• 关键词: Ultra-precision facing diamond lathe; Intelligent machine element; Linear motor; Vacuum chuck; プラスチック多孔質体; レーザ光; 真直度測定法; 4分割フォトダイオード

The research and development on ultra-precision turning is activated under the demand for mirror finishing of soft metals. The principle of the turning is to transcribe the high accuracy of machine tools to the finishing surface. In thes project the effective machine elements which are not currently in use are applied into the precision machine tools in order to improve the accuracy. the results are summarized as follows:(1) The 0.2 m of waveness was observed on the turned surface using the developed lathe, which was generated due to the error motions of the air bearing spindle and the air bearing slide.(2) The investigation on the application of a linear motor to the lathe indicated that the good straightness was obtained with the low-friction guide but the velocity deviation occurred due to the low stiffness.(3) Fluorocarbon polymers had a good madhinabiliyt, a high resistance against the deformation during the suction, and a high coefficient of Aluminum discd using the chuck indicated a good radius straightness and a good outer straightness due to the high Young's ration.(4) The two-dimensional straightness measurement method using the straightness of the laser beam as the reference had a high resoultion and wide range but the xdattering of the output voltage was observed due to the unstability of the source of laser beam and the air turbulence along the laser path

超精密车削的研发是在软金属镜面精加工的需求下启动的。车削的原理是将机床的高精度转录到精加工表面上。在该项目中，目前未使用的有效机械元件被应用到精密机床中，以提高精度。结果总结如下：（1）在开发的车床上观察到0.2 m的波动，这是由于空气轴承主轴和空气轴承滑块的误差运动产生的。（2）直线电机在车床上的应用研究表明，低摩擦导轨获得了良好的直线度，但由于刚度低而出现了速度偏差。（3） 氟碳聚合物具有良好的可加工性，在吸附过程中抗变形能力强，并且采用卡盘的铝圆盘系数高，由于杨氏比高，表明其具有良好的半径直线度和良好的外直线度。(4)以激光束直线度为基准的二维直线度测量方法分辨率高、范围宽，但存在误差。 由于激光束源的不稳定和沿激光路径的空气湍流，观察到输出电压的变化

项目成果

上村康幸・谷泰弘・佐藤壽芳・鈴木博英: 昭和61年度精密工学会秋季大会学術講演会. 699-700 (1986)

Yasuyuki Uemura、Yasuhiro Tani、Hisayoshi Sato、Hirohide Suzuki：1985 年日本精密工程学会秋季会议学术讲座 699-700 (1986)。

上村康幸,谷泰弘,佐藤壽芳,鈴木博英: 昭和61年度精密工学会秋季大会学術講演会. 699-700 (1986)

Yasuyuki Uemura、Yasuhiro Tani、Hisayoshi Sato、Hirohide Suzuki：1985 年日本精密工程学会秋季会议学术讲座 699-700 (1986)。

谷泰弘・池野順一・佐藤壽芳・冷水真: 超精密加工技術に関する講演会. 17 (1987)

Yasuhiro Tani、Junichi Ikeno、Hisayoshi Sato、Makoto Hizumi：超精密加工技术讲座 17 (1987)。

谷泰弘: "最新精密計測技術(光切断法)" (株)総合技術センター, (1987)

谷康博：“最新精密测量技术（光学切割法）”崇光技术中心有限公司（1987）

Yasuhiro,TANI;Jun'ichi,IKENO;Hisayosi,SATO; Makoto,HIYAMIZU: "Application of Sintered Nylon to a Vacuum chuck (1st Report,Evaluation of the Retention by Suction)" Prep. of JSME. 17 (1987)

谷泰弘；池野淳一；佐藤久世；