Integrated GD-OES/XRF element analyzer (GD-OES = glow discharge optical emission spectroscopy, XRF = X-ray fluorescene)

定量元素分析在物理学、材料科学和工程学的许多领域中发挥着核心作用。以下是杜伊斯堡-埃森大学应用工作组的典型应用实例：在研究用于可再生能源的新材料时，必须知道所制造的薄膜的厚度和成分，特别是吸收层的厚度和成分。为了获得有关器件质量的准确陈述，获得与深度相关的元素分布的信息同样重要，特别是对于多元材料，如白榴石(由AG Schmidt研究)或钙钛矿(AG Kirchartz、AG Lupascu、AG Winterer)。此外，对于由多铁材料制成的磁性异质结构，组成也是决定性的。像CoFe2O4/BaTiO3这样的多相纳米复合层目前正在由相关小组AG文德和AG Lupascu进行研究。多铁性质的纳米粒子(AG文德、AG Lupascu)或用于光催化的氮化物和氧化物(AG Winterer)是研究的对象，其基础是对其组成的了解。最后，对于掺杂稀土元素或过渡金属(Cr、Eu、Tb)的氧化物(Al_2O_3、ZrO_2)，晶格内掺杂离子的浓度和分布决定了例如热学性质，并由AG Atakan进行了分析。上述例子的广泛性说明了覆盖广泛的元素的必要性。同时，应达到低至ppm范围的分辨率。为此，一方面，固体、粉末和必要的液体样品的整体组成值是有意义的。另一方面，对于固体样品，特别是薄膜样品，元素的深度分布是相关的。作为测量方法，可以快速分析几个微米的深度，测量精度在几个ppm的范围内，有两种方法：X射线荧光法(XRF)，用于粉末和液体样品的积分值，以及辉光放电光学发射光谱(GD-OES)，用于固体样品的深度分辨结果。使用能量色散XRF的测量是非破坏性的，并且从元素Na开始可用。Gd-OES以研磨的方式测量，但提供了对C、O和N等轻元素的访问。XRF和GD-OES这两种方法的结合允许在最小限度地牺牲精度和非破坏性的情况下对广泛的元素光谱进行最佳覆盖。集成版本还便于交叉校准以获得可靠的量化值。彻底的校准是有意义的测量的基础，这是拟议的集成GD-OES/XRF元素分析仪所期望的。

Quantitative element analysis plays a central role in many fields of physics, material science and engineering. In the following, typical application examples of the applying working groups at the University of Duisburg-Essen are given:When researching novel materials for renewable energies, it is essential to know thicknesses and composition of the fabricated thin films, in particular of the absorber layers. In order to arrive at precise statements about the device quality, it is equally important to obtain information about the depth-dependent element distribution, in particular for multinary materials like chalkoyprites (researched by AG Schmid) or perovskites (AG Kirchartz, AG Lupascu, AG Winterer). Also for magnetic heterostructures made from multiferroic materials the composition is decisive. Multiphase nanocomposite layers like CoFe2O4/BaTiO3 are currently under research by the involved groups AG Wende and AG Lupascu. Nanoparticles of multiferroic nature (AG Wende, AG Lupascu) or based on nitrides and oxides for the application in photocatalysis (AG Winterer) are a subject of research, which basis on the knowledge of their composition. Finally, for oxides (Al2O3, ZrO2) doped with rare earth elements or transition metals (Cr, Eu, Tb) the concentration and distribution of doping ions within the lattice are determining for example the thermographic properties and are analyzed by the AG Atakan.The broadness of the mentioned examples illustrates the necessity of covering a broad spectrum of elements. At the same time, a resolution down to the ppm range shall be reached. For this, on the one hand side the integral composition values of solid, powder and where necessary liquid samples are of interest. On the other hand, for solid samples, in particular thin films, the depth-dependent element distribution is relevant.As measurement methods, which allow a quick analysis over a depth of up to several micrometers with a measurements precision in the range of few ppm, two methods offer themselves: X-ray fluorescence (XRF) for integral values also of powder and liquid samples and glow-discharge optical emission spectroscopy (GD-OES) for depth-resolved results of solid samples. Measurements using energy-dispersive XRF are non-destructive and available starting from the element Na. GD-OES in contrast measures in an abrasive way, but provides access to the light elements like C, O and N. The combination of the two methods XRF and GD-OES allows an optimal coverage of a broad element spectrum under minimal compromises of precision and non-destructiveness. The integrated version additionally facilitates a cross calibration to obtain reliable quantitative values. A thorough calibration is the basis for meaningful measurements, which are expected from the proposed integrated GD-OES/XRF element analyzer.