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STUDIES ON ULTRA HIGH SPEED ELECTROSTATIC DISCHARGE PHENOMENA

超高速静电放电现象的研究

基本信息

批准号：
02452136
负责人：
ODA Tetsuji
金额：
$ 3.58万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1992
项目状态：
已结题

项目摘要

The aim of this research is a fundamental study of very high speed electrostatic discharge (ESD) phenomena which have never examined in details although ESD is already very well-known. Especially, a very fast rise-time pulse ESD with a very short discharge gap length has been studied in this research. A uniformly corona-charged FEP or PTFE teflon sheets (film) with thickness of 25, 50, 100 or 200 mum is located on a flat ground plate and a sphere electrode connected to the ground plate with an earth wire approaches to the charged film with a constant velocity. When the electrostatic discharge occurs between the film and the electrode, a current-transformer (CT) can detect the discharge current through the earth-wire and the discharge current wave form is recorded by the transient digitizer whose sampling rate is 100GS/s and the frequency range is 500MHz. A whole system is controlled by a personal computer and all data are stored in a floppy disk. When the film is charged positively, it is found that the discharge gap length for the film is rather larger than that for the negatively charged film. On the other hand, peak current value and total-moved charge are a little bit small. Initial charge supply tests by beta-ray irradiation or UV-irradiation was found to be not so effective. Some noise generation by ESD is also examined. ESD between the dielectric films (one is charged) was also tested where the reduction of the gap length is roughly 30% and the reduction rate of the current etc. very large, that is, the current is only one third or one forth.

这项研究的目的是非常高速静电放电（ESD）的现象，从来没有详细检查，虽然ESD已经非常知名的基础研究。特别是，非常快的上升时间的脉冲ESD与一个非常短的放电间隙长度已在这项研究中。将均匀电晕充电的厚度为25 μ m、50 μ m、100 μ m或200 μ m的FEP或PTFE聚四氟乙烯片（膜）放置在平坦的接地板上，通过接地线连接到接地板的球形电极以恒定速度接近充电的膜。当薄膜与电极之间发生静电放电时，电流互感器（CT）通过接地线检测放电电流，并由采样率为100 GS/s、频率范围为500 MHz的瞬态数字化仪记录放电电流波形。整个系统由个人计算机控制，所有数据存储在软盘中。当薄膜带正电时，发现薄膜的放电间隙长度比带负电的大得多。另一方面，峰值电流值和总移动电荷有点小。发现通过β射线照射或UV照射的初始电荷供应测试不是那么有效。还研究了ESD产生的一些噪声。还测试了介电膜（一个是带电的）之间的ESD，其中差距长度的减小约为30%，并且电流等的减小率非常大，即，电流仅为三分之一或四分之一。