Study on Electric Field and Electron-Energy Distribution Estimation Using Simultaneous Measurement of Many Spectra Emitted from Electrical Discharge.

提出了一种新的计算电场、电子温度和电子密度的实用方法。基于电子态跃迁模型，从理论上预测了放电空间中电子群的发射率随电场强度的变化关系。两个不同的光谱发射强度的比率也被确定为电场的函数，并有效地用于估计电场。通过使用发射速率和测量的发射强度，可以估计电子密度。通过测量电场强度和氮的第二正系统和第一正系统的发射率，对电子态间的跃迁系数和测量系统的效率进行了标定。实验结果表明，采用该方法可以在10%的精度内用光谱法测量氮气辉光放电中的电场和电子密度，并将该方法应用于针-板间隙辉光放电的测量。结果表明，针尖附近的电场强度可达1 kV/cm/Torr左右，提出了一种新的测量分子转动温度的方法，该方法有效地利用了氮原子第一正系统的信息。在正柱区，新方法的计算值与热扩散方程的计算值在10%以内吻合.以氩气为探针气体，通过测量氩气和氮气的发射强度，估算了电场和电子密度.利用探测气体不仅可以估算出电子的平均能量，而且可以估算出电子的能量分布。

A new useful method for estimating electric field, electron temperature and electron density is developed. The emission rate from a discharge space, in which electron swarm is described by Boltzman equation, is theoretically predicted as a function of electric field strength based on an electronic-state-transition model. The ratio of two different spectral emission intensities is also determined as a function of electric field and is effectively used to estimate the electric field. By using both the emission rate and the measured emission intensity, electron density can be estimated. The calibration of transition coefficients between electronic states and the efficiency of measuring system are made by measuring electric field strength and the emission rate of second positive system and first positive system of nitrogen. Using this calibration method, it is found that electric field and electron density in nitrogen glow discharge can be spectroscopically determined within the accuracy of 10%.The spectroscopic approach using the calibration method is applied to the measurement of a glow discharge in a needle-to-plane gap. The result shows that the electric field near the needle tip reaches around 1kV/cm/Torr.A new method for measuring molecular rotational temperature is proposed, in which the information on first positive system of nitrogen is effectively used. The value estimated by the new method agree with those calculated based on heat diffusion equation within 10% in the positive column region.Using argon gas as a probe gas, electric field and electron density are estimated from the measurements of the emission intensities from both argon and nitrogen. Not only mean electron energy but also electron energy distribution can be estimated by using some probing gases.