Design and fabrication of multilayr thin film 3D optical planar circuit using birefringence

利用双折射的多层薄膜3D光学平面电路的设计和制造

• 批准号: 05650336
• 负责人: HSU Jui-pang
• 金额: $ 1.41万
• 依托单位: KANAGAWA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05650336/
• 关键词: optical planar circuit; multilayred thin film structure; 3-D optical waveguide; structure anisotropy; strong confinement; polarization maintaining waveguide; 導波路

In this research, wide separation of TE and TM slab-mode propagation constant being realized by multilayred thin-film structure, three dimentional (3D) optical wave guides, where single mode operation or polarization-maintaining operation are expected, are analyzed based on optical planar circuittheory. The corresponding 3D optical waveguides are fabricated, measured and compared with the analytical results. Also as a basic research for optical planar circuit with 2D pattern to confined the optical field laterally, simple optical circuit such as bend with large bend angle, Y branch line with large branching angle and circular bend are analyzed and experimented. Following results, still preliminary, are obtained.(1) Multilayred thin-film slab waveguide being constructed by TiO2/SiO2,10 layrs are enough for sufficient TE-TM mode separation, which is also confirmed by calculation and experiment.(2) Loss at this time is measured to be l. 6dB/cm for TM mode and 3dB/cm for TE mode.(3) As for … More the analysis of 3D optical waveguide, supposing the top and bottom metal boundary at the proper position, about 25 height modes of TE and TM are necessary to realize the continuity of the tangential field components.(4) As for multilayred 3D optical wave guide, single mode operation is possible for 0.3mu thickness but multi mode operation for 0.6mu with step-type side-confinement, Rib-type side-confinement again makes this structure single mode operation.(5) Dielectric strip loaded 3D optical waveguide with multilayred structure is analyzed theoretically.Effect of the dielectric thickness is saturaed with thickness because of exp decay of the field.(6) Using the above structure, maximum bend angle is estimated based on geometrical optics. This result is confirmed by experiment.(7) Rib-type multilayred 3D optical waveguide with asymmetrical structure is analyzed theoretically, where number of layrs at both side are controlled separately. Interesting results are obtaind.(8) It is pointed out that parallel coupled optical waveguide using above structure can control the coupling strength widely. Propagation constant of the parallel coupled waveguides is calculated, which confirms the existence of strong coupling.(9) In addition, it must be noted that field analysis of the strongly confined 3D optical waveguide discontinuity and thecorresponding experiment has beeen carried out in parallel with the research of the multilayred optical waveguide. Less

本研究利用多层薄膜结构实现TE和TM板模传播常数的大范围分离，基于平面光路理论分析了可实现单模或保偏工作的三维光波导。相应的三维光波导的制作，测量和分析结果进行了比较。作为二维平面光路横向光场限制的基础研究，对大弯曲角的弯曲、大分支角的Y分支线和圆形弯曲等简单光路进行了分析和实验。以下结果，仍然是初步的，获得。(1)由TiO_2/SiO_2构成的多层薄膜平板波导，10层薄膜就足以实现充分的TE-TM模分离，计算和实验也证实了这一点。(2)此时的损失被测量为l。TM模式为6dB/cm，TE模式为3dB/cm。(3)至于 ...更多信息 对三维光波导的分析表明，假设上下金属边界在适当的位置，要实现切向场分量的连续性，需要大约25个TE和TM高度模。(4)对于多层3D光波导，0.3 μ厚的波导可以实现单模工作，而0.6 μ厚的波导可以实现多模工作。(5)对介质条加载的多层结构三维光波导进行了理论分析，由于场的衰减，介质厚度的影响随厚度而饱和。(6)使用上述结构，基于几何光学估计最大弯曲角度。这一结果得到了实验的证实。(7)对两侧层数分别控制的非对称结构脊型多层三维光波导进行了理论分析。得到了有趣的结果。(8)指出采用这种结构的平行耦合光波导可以在很宽的范围内控制耦合强度。计算了平行耦合波导的传播常数，证实了强耦合的存在。(9)此外，还必须指出，强约束三维光波导不连续性的场分析和相应的实验是与多层光波导的研究并行进行的。少

项目成果

外丸,穴田,許: "多層超薄膜ストリップ装荷形3次元光導波路ベンドの導波特性" 1995年電子情報通信学会春季大会. C-360(発表). (1995)

Sotomaru、Anada、Yuu：“多层超薄膜条带加载三维光波导弯曲的波导特性”1995 年 IEICE 春季会议（演示文稿）。

外丸,穴田,許: "多層超薄膜ストリップ装荷形3次元光導波路ベンドの導波特性" 1995年電子情報通信学会春季大会. C-306(発表). (1995)

Sotomaru、Anada、Yuu：“多层超薄膜条带加载三维光波导弯曲的波导特性”1995 年 IEICE 春季会议（1995 年）。

大井、外丸、穴田、許: "非対称ステップ形多層超薄膜3次元光導波路構造の伝搬定数の解析" 1994年電子情報通信学会春季大会. C-263(発表). (1994)

Oi、Sotomaru、Anada、Hiroshi：“非对称阶梯型多层超薄三维光波导结构的传播常数分析”1994 年 IEICE 春季会议（1994 年）。

T.Anada,Hsu,Jui-Pang: "Analysis of polarisation maintaining 3D waveguide in very thin multilayer films structure" 24th European Microwave Conference 94. B2.2. 567-572 (1994)

T.Anada、Hsu、Jui-Pang：“极薄多层膜结构中保偏 3D 波导的分析”第 24 届欧洲微波会议 94。B2.2。

S.Tomaru, M.Ohi, T.Anada, Hsu, Jui-Pang: "Guided mode properties of very thin multilayr films 3-D optical waveguide." THE 1994 IEICE FALL CONFERENCE. C-226. 227

S.Tomaru、M.Ohi、T.Anada、Hsu、Jui-Pang：“非常薄的多层薄膜 3-D 光波导的导模特性。”