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Manufacturing of Microstructures Produced by UV Sensitive Photopolymer Using Laser Beam Writing

Manufacturing of Microstructures Produced by UV Sensitive Photopolymer Using Laser Beam Writing
使用激光束写入制造由紫外线敏感光聚合物产生的微结构
批准号:
06452159
负责人:
YAMAUCHI Katsumi
金额:
$4.8万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for General Scientific Research (B)
财政年份:
1994
资助国家:
日本
项目状态:
已结题
起止时间:
1994 至 1995

项目摘要

项目成果

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中文摘要
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英文摘要
This research work deals with the development of a simple and practical method for manufacturing micro mechanical parts. In this method, high aspect ratio (height/width) polymer structures and stacked three dimensional polymer structures are produced using a direct focused UV laser beam writing on the surface of liquid photopolymer. The irradiated portion of the photopolymer is solidified and it becomes a polymer structure. At first, the solidified shapes of the polymer are examined both theoretically and experimentally. Next, the optimum conditions to produce high aspect ratio and stacked three dimensional micro polymer structures are verified. At last, examples of structures are produced by using these conditions such as micro gear and micro bent pipe.
期刊论文(80)
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会议论文
K.Yamaguchi: "The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization" Trans.of ASME,J.of Engineering for Industry. 116. 370-376 (1994)
K.Yamaguchi:“紫外激光诱导聚合生产的微型模具的精度”Trans.of ASME、J.of Engineering for Industry。
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K.Yamaguchi: "Consideration on the Optimum Conditions to produce Micromechanical Parts by Photo Polymerization Using Direct Focused Beam Writing" Proc.of 6th International Symposium on Micro Machine and Human Science. 71-76 (1995)
K.Yamaguchi:“考虑使用直接聚焦光束写入的光聚合生产微机械零件的最佳条件”第六届国际微型机械与人类科学研讨会论文集。
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K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of 2nd Int.Symposium on Microstructures and Mechanical Properties of New Engineering Material. 535-542 (1995)
K.Yamaguchi:“Micromachining using UV Laser Induced Polymerization”Proc.of 2nd Int.Symposium on Microstructural and Mechanical Properties of New Engineering Materials。
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山口勝美: "紫外線感光性樹脂を使った集束レーザビームによるマイクロ部品の製作" 1994年度精密工学会秋季大会学術講演会講演論文集. 625-626 (1994)
Katsumi Yamaguchi:“使用紫外线敏感树脂使用聚焦激光束制造微型零件”1994年日本精密工程学会秋季会议学术会议记录625-626(1994)。
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