Manufacturing of Microstructures Produced by UV Sensitive Photopolymer Using Laser Beam Writing

使用激光束写入制造由紫外线敏感光聚合物产生的微结构

• 批准号: 06452159
• 负责人: YAMAUCHI Katsumi
• 金额: $ 4.8万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06452159/
• 关键词: Micro Part; UV Photopolymer; Focused Laser Beam; High Aspect Ratio; Three Dimensional Part; Beam Writing; Absorption of Light

This research work deals with the development of a simple and practical method for manufacturing micro mechanical parts. In this method, high aspect ratio (height/width) polymer structures and stacked three dimensional polymer structures are produced using a direct focused UV laser beam writing on the surface of liquid photopolymer. The irradiated portion of the photopolymer is solidified and it becomes a polymer structure. At first, the solidified shapes of the polymer are examined both theoretically and experimentally. Next, the optimum conditions to produce high aspect ratio and stacked three dimensional micro polymer structures are verified. At last, examples of structures are produced by using these conditions such as micro gear and micro bent pipe.

本研究工作涉及开发一种简单实用的制造微机械零件的方法。该方法利用直接聚焦的紫外激光束写入液体光聚合物表面，制备了高纵横比（高/宽）聚合物结构和堆叠的三维聚合物结构。所述光聚合物的辐照部分固化并成为聚合物结构。首先，从理论上和实验上对聚合物的固化形状进行了检验。其次，验证了制备高纵横比和叠层三维微聚合物结构的最佳条件。最后给出了利用这些条件的结构实例，如微齿轮和微弯管。

项目成果

K.Yamaguchi: "The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization" Trans.of ASME,J.of Engineering for Industry. 116. 370-376 (1994)

K.Yamaguchi：“紫外激光诱导聚合生产的微型模具的精度”Trans.of ASME、J.of Engineering for Industry。

K.Yamaguchi: "Consideration on the Optimum Conditions to produce Micromechanical Parts by Photo Polymerization Using Direct Focused Beam Writing" Proc.of 6th International Symposium on Micro Machine and Human Science. 71-76 (1995)

K.Yamaguchi：“考虑使用直接聚焦光束写入的光聚合生产微机械零件的最佳条件”第六届国际微型机械与人类科学研讨会论文集。

K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of 2nd Int.Symposium on Microstructures and Mechanical Properties of New Engineering Material. 535-542 (1995)

K.Yamaguchi：“Micromachining using UV Laser Induced Polymerization”Proc.of 2nd Int.Symposium on Microstructural and Mechanical Properties of New Engineering Materials。

山口勝美: "紫外線感光性樹脂を使った集束レーザビームによるマイクロ部品の製作" 1994年度精密工学会秋季大会学術講演会講演論文集. 625-626 (1994)

Katsumi Yamaguchi：“使用紫外线敏感树脂使用聚焦激光束制造微型零件”1994年日本精密工程学会秋季会议学术会议记录625-626（1994）。

T.Nakamoto: "The Solidified Shape Produced by UV Laser Induced Polymerization in a Direct Writing Method" Proc.of 1994 Winter Annual Meeting of the ASME. PED.68. 433-441 (1994)

T.Nakamoto：“The Solidified Shape Produced by UV Laser Induced Polymerization in a Directwriting Method”Proc.of 1994 年冬季年会 ASME。