PREPARATION AND ITS PROPERTIES OF ORIENTED SnO_2 THIN FILMS

取向SnO_2薄膜的制备及其性能

• 批准号: 06650741
• 负责人: KANEKO Shoji
• 金额: $ 0.96万
• 依托单位: SHIZUOKA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06650741/
• 关键词: Spray Pyrolysis; Tin Oxide Film; Preferred Orientation; Transparency; Conductivity; 酸化スズ薄膜

In 1994, the study was favorably advanced to the goal via the modified routes. The development of a novel source compound by the introducion of desired substitutional groups into the central atom, Sn, of organotin compound was difficult. Therefore, both di-butyltin-di-acetate and tetra-butyltin, of which the thermal decomposition processes had been analyzed by vapor pressure measurement and mass spectroscopy, were used as source compounds here. Further, a newly designed ultrasonic spray pyrolysis apparatus also was working with difficulty in the determination of the operation conditions. As a result, the runs for film deposition on a glass substrate were performed with the present apparatus. Highly oriented tin oxide thin film with (110) or (200) crystalline plane was obtained at a low temperature below 480ﾟC.The microstructure of this oriented films were possibly related to the deposition conditions. In 1995, the electrical and optical properties of the oriented thin films were clarified. The resistivity and transmittance of the oriented film was about 1 OMEGAcm and 85%, respectively. The addition of antimony or fluorine added to the oriented film as a dopant was extremely effective for lowering the resistivity. The above-mentioned findings have been also presented at the three meetings and in our three research papers. Consequently, the objective of this two-year research project has been significantly attained. The applications of these oriented films to a transparent electrode and a novel thin film substrate will be next goals of this project.

1994年，该研究通过改进的路线顺利推进到目标。通过在有机锡化合物的中心原子Sn上引入所需的取代基来开发新的源化合物是困难的。因此，二丁基锡-二乙酸酯和四丁基锡，其中的热分解过程已通过蒸气压测量和质谱分析，被用作源化合物在这里。此外，新设计的超声波喷雾热解装置在确定操作条件方面也存在困难。结果，用本装置进行在玻璃基板上的膜沉积的运行。在低于480 ℃的低温下得到了具有（110）或（200）晶面的高度取向的氧化锡薄膜，这种取向薄膜的微观结构可能与沉积条件有关。1995年，取向薄膜的电学和光学性质得到了阐明。取向膜的电阻率和透射率分别为约1 Ω Acm和85%。向取向膜中添加锑或氟作为掺杂剂对于降低电阻率是极其有效的。上述调查结果也在三次会议上和我们的三份研究文件中提出。因此，这一为期两年的研究项目的目标已大大实现。这些取向薄膜在透明电极和新型薄膜基板上的应用将是本项目的下一个目标。

项目成果

S.Kaneko et al.: "Preparation and Properties of Oriented Tin Oxide Thin Films on Glass Substrates by Spray Pyrolysis of Organotin Compounds" Proc.Int.Symp.Surf.Thin Films Electronic Mater.(in press).

S.Kaneko 等人：“通过有机锡化合物的喷雾热解在玻璃基板上制备定向氧化锡薄膜及其性能”Proc.Int.Symp.Surf.Thin Films Electronic Mater.（​​出版中）。

I.Yagi et al.: "Preferred Orientation of SnO_2 Thin Films Grown from Tri-Butyltin Acetate by Spray Pyrolysis Technique" J.Ceram.Soc.Japn.102. 296-298 (1994)

I.Yagi 等人：“通过喷雾热解技术从醋酸三丁基锡生长的 SnO_2 薄膜的优选取向”J.Ceram.Soc.Japn.102。

I.Yagi et al.: "Preferred Orientation of SnO_2 Thin Films Grown from Tri-Buyltin Acetate by Spray Pyrolysis Technique" J. Ceram. Soc. Jpn.102. 296-298 (1994)

I.Yagi 等人：“通过喷雾热解技术从醋酸三丁基锡生长的 SnO_2 薄膜的优选取向”J. Ceram。

S.Kanako et al.: "" Preparation and Properties of Oriented Tin Oxide Thin Films on Glass Substrates by Spray Pyrolysis of Organotin Compounds "" Proc.Int.Symp.Surf.Thin Films Electronic Mater.(in press).

S.Kanako 等人：“通过有机锡化合物的喷雾热解在玻璃基板上制备定向氧化锡薄膜及其性能”Proc.Int.Symp.Surf.Thin Films Electronic Mater.（​​出版中）。

K.Murakami et al.: "Oriented Growth of Tin Oxide Thin Films on Glass Substrate by Spray Pyrolysis of Organotin Compounds" J.Am.Ceram.Soc.(in press).

K.Murakami 等人：“通过有机锡化合物的喷雾热解在玻璃基板上定向生长氧化锡薄膜”J.Am.Ceram.Soc.（印刷中）。