Semi-automatic wafer probe station

半自动晶圆样品台

• 批准号: 450639102
• 金额: --
• 依托单位: Technische Universität Dortmund
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2020
• 资助国家: 德国
• 起止时间: 2019-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/450639102?language=en
• 关键词: Semi; automatic; wafer; probe; station

Semi-automatic wafer probe stations are the state-of-the-art tool for current-voltage characterization (IV-curves) and capacitance-voltage profiling (CV-curves) of semiconductor sensors and the measurement of their properties. They do not only allow a very high throughput, but also achieve very precise temperature and environmental control at low temperatures necessary for many applications in semiconductor research. The probe station requested will be used by the two experimental particle physics groups of the TU Dortmund University.The working group of Prof. Kröninger is involved in research projects in experimental particle physics and medical physics with the aim to create synergies between these two fields. Current research projects for which such a wafer probe station is crucial include the study of the sensor design and the development of quality control measures for the new ATLAS ITk pixel detector as well as research and development of radiation-hard silicon sensors for future experiments. In the realm of medical physics, the wafer probe station is necessary for the study of semiconductor detectors for proton therapy, the development of a proton radiography system as well as for electronic dosimetry with silicon sensors. The working group of Prof. Albrecht is involved in the LHCb experiment and will use the wafer probe station for the development of a beam condition monitor as well as research and development for semiconductor-based tracking detectors for future experiments, including LHCb upgrade II.

半自动晶圆探针站是半导体传感器的电流-电压表征（iv -曲线）和电容-电压分析（cv -曲线）及其性能测量的最先进工具。它们不仅允许非常高的吞吐量，而且还可以在半导体研究中的许多应用所需的低温下实现非常精确的温度和环境控制。所要求的探测站将由多特蒙德大学的两个实验粒子物理小组使用。Kröninger教授的工作组参与了实验粒子物理学和医学物理学的研究项目，目的是在这两个领域之间产生协同效应。对晶圆探测站至关重要的当前研究项目包括新型ATLAS ITk像素探测器的传感器设计研究和质量控制措施的开发，以及用于未来实验的抗辐射硅传感器的研究和开发。在医学物理领域，晶圆探测站对于质子治疗的半导体探测器的研究、质子放射照相系统的开发以及硅传感器的电子剂量测定是必要的。Albrecht教授的工作小组参与了LHCb实验，并将使用晶圆探测站开发光束状态监测器，以及研究和开发基于半导体的跟踪探测器，以用于未来的实验，包括LHCb升级II。