Liquid-vapor structure under boiling bubbles on MEMS heat transfer surfaces during high heat flux boiling

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This research aims to reveal the liquid-vapor structure beneath the coalescing boiling bubbles by realizing the minimum unit of boiling phenomena, a pair of coalescing bubbles. First, we have conducted the ordinary boiling experiment in a confined space (Hele-Shaw cell). We found the coalescence of the bubble and liquid portion under the bubble. In accordance with the experimental results, we design an MEMS heat transfer surface with 1) Thin film heaters for transient heating, 2) Nickel electrodes for making a tiny hydrogen bubble as boiling nuclei, and 3) thin film thermocouples.