Fabrication of nano - structure using highly charged ions

使用高电荷离子制造纳米结构

• 批准号: 10554017
• 负责人: SAKURAI Makoto
• 金额: $ 8.45万
• 依托单位: KOBE UNIVERSITY (1999-2000)Okazaki National Research Institutes (1998)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-10554017/
• 关键词: Highly charged ion; Electron beam ion source; nano-structure; Surface and interface; Coincidence measurement; 表面科学

Highly charged ion produces structural modification in nm scale on the surface of various materials. Highly charged ions are expected to become a powerful tool for the fabrication of nano-structure and nano-devices. In the present research project, various technical development were performed for the possible production facility of nano-devices using highly charged ions.The research subjects performed in the present project are as follows ;1. Development of beam transport system which transfer highly charged ions produced at the electron beam ion trap (Tokyo EBIT) to an irradiation chamber connected to the beam transport.2. Development of new feeding system of seed ions into the EBIT using wire probe technique.3. Development of a measurement system of the number distribution of secondary electrons emitted from the surface irradiated by highly charged ions.

高电荷态离子在各种材料表面产生纳米尺度的结构修饰。高电荷态离子有望成为制造纳米结构和纳米器件的有力工具。在本研究项目中，对使用高电荷离子的纳米器件的可能生产设备进行了各种技术开发。本研究项目的研究课题如下：1.开发了将电子束离子阱（Tokyo EBIT）产生的高电荷态离子转移到与束流传输器相连的辐照室的束流传输系统.利用线探针技术开发了EBIT种子离子注入系统.高电荷态离子辐照表面二次电子数分布测量系统的研制。

项目成果

H.Shimizu: "Characteristics of the beam line at an electron beam ion trap"Rev.Sci.Instrum.. 71. 681-683 (2000)

H.Shimizu：“电子束离子陷阱的束线特征”Rev.Sci.Instrum.. 71. 681-683 (2000)

H.Kimura: "Infrared beamline BL43IR at SPring-8 : design and commissioning"Nucl. Instrum. Meth.. (to be published). (2001)

H.Kimura：“SPring-8 的红外光束线 BL43IR：设计和调试”Nucl。

H.Kuramoto: "High energy operation of the Tokyo-electron beam ion trap"Rev. Sci. Instrum.. 71. 687-689 (2000)

H.Kuramoto：“东京电子束离子阱的高能操作”Rev。

I.Yamada: "Electron capture cross sections in slow highly charged ion-atom and -mdecule collisions"Proc.21th Int.Conf.on Phys.of Electronic and Atomic Collisions. 553 (1999)

I.Yamada：“慢速高电荷离子-原子和-mdecule碰撞中的电子捕获截面”Proc.21th Int.Conf.on Phys.of Electronic and Atomic Collisions。

T.Hirayama: "Desorption of an excimer from the surface of solid Ne by low energy electron and photon impact"Phys.Rev.B. (発表予定). (2001)

T. Hirayama：“通过低能电子和光子撞击从固体氖表面解吸准分子”Phys.Rev.B（待提交）。