Highly sensitive high frequency carrier type thin film sensor

高灵敏度高频载波型薄膜传感器

• 批准号: 14350214
• 负责人: ARAI Ken ichi
• 金额: $ 9.15万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350214/
• 关键词: phase detection; high frequency carrier type thin film sensor; magnetic field; highly sensitive; Dual Mixer Time Difference Method; 高周波キャリア型薄膜磁界センサ; 超高感度磁界計測

We propose herein a method by which to measure the phase of the carrier in a high frequency carrier-type sensor (GMI sensor). The proposed method is based on a carrier suppression technique. The phase of the carrier signal changed dramatically by approximately 180 degrees around the carrier suppression when a small dc field was applied. The phase sensitivity for a small DC field reached 3600 degrees/Oe. In addition we investigate the relationship between phase sensitivity and suppressed carrier level in the suppression circuit, the measured data nearly corresponded to theoretical data. We have fabricated a sensor system which is composed of sensor element and Dual Mixer Time Difference (DMTD) method to detect a change of phase difference as a function of small magnetic field. Sensor element was fabricated as a meander pattern, and the phase difference was about 5 degrees/Oe. The jitter level was decreased about 5.5x10^<-4> degrees when the sample rate was 1 kHz. The resolution of magnetic field detection was obtained about 3.3x10^<-6> Oe/Hz^<1/2>.

本文提出了一种在高频载波型传感器（GMI传感器）中测量载波相位的方法。所提出的方法是基于载波抑制技术。当施加小的直流场时，载波信号的相位在载波抑制附近急剧变化约180度。在小直流磁场下，相位灵敏度可达3600度/Oe。此外，还研究了抑制电路中相位灵敏度与抑制载波电平的关系，实测数据与理论数据基本一致。我们制作了一个传感器系统，它是由传感器元件和双混频器时间差（DMTD）的方法来检测相位差的变化作为一个功能的小磁场。传感器元件被制造为曲折图案，并且相位差约为5度/Oe。当采样率为1 kHz时，抖动水平降低约5.5 × 10 - <-4>4度。磁场探测的分辨率为3.3 × 10 <-6>~（-1）Oe/Hz。

项目成果

薮上 信: "位相計測による高周波キャリア型薄膜磁界センサ"日本応用磁気学会誌. 27(印刷中). (2003)

Shin Yabukami：“使用相位测量的高频载波型薄膜磁场传感器”日本应用磁学学会杂志27（出版中）。

S.Yabukami: "High-Frequency Carrier Type Thin Film Magnetic Field Sensor Using Phase Detection"Transactions of the Magnetics Society of Japan. vol.27. 425-428 (2003)

S.Yabukami：“使用相位检测的高频载波型薄膜磁场传感器”日本磁学会会刊。

T.Ozawa: "High frequency carrier-type magnetic sensor system with phase difference detection using Dual Mixer Time Difference method"Technical Report of The Institute of Electrical Engineers of Japan. MAG-03-187. 41-44 (2003)

T.Ozawa：“使用双混频器时差法进行相位差检测的高频载波型磁传感器系统”日本电气工程师学会的技术报告。

小澤哲也: "Dual Mixer Time Difference法による位相差検出型高周波キャリア型磁界センサシステム"電気学会マグネティックス研究会資料. MAG-03-187. 41-44 (2003)

Tetsuya Ozawa：“使用双混频器时间差法的相位差检测高频载波型磁场传感器系统”IEEJ Magnetics Study Group Material。

T.Ozawa: "High Frequency Carrier-Type Thin Film Sensor by Phase Difference Measurement"The 1st Student-Organizing International Mini-Conference on Information Electronics System. vol.B2-10. 158-160 (2003)

T.Ozawa：“通过相位差测量的高频载体型薄膜传感器”第一届学生组织的信息电子系统国际小型会议。