Cryogenic DM for characterization of exoplanet

为了期待这项直接探测太阳系外行星空气光谱这一重要问题的应用研究的目的，正在进行红外空间望远镜搭载的低温变形镜的研制实际验证。在变形镜的驱动系统中，它是微型机电系统。(MEMS)系统被采用。并且能够进行考虑冷却时最大问题的热应力的设计，并且能够制作和检验在低温(5K)下工作的多个元件(1000个元件)的DM。

In order to expect the purpose of this application research to an important problem called the air spectrum by the direct detection of an extrasolar planet, it is carrying out the development actual proof of the cryogenic temperature deformable mirror carried in an infrared space telescope.In the drive system of a deformable mirror, it is Micro-Electronic Mechanics System. (MEMS) the system was adopted. And the design in consideration of the heat stress which is the biggest problem at the time of cooling was able to be performed, and DM of the many elements (1000 elements) which operate by cryogenic temperature (5K) was able to be made and examined.