Study of High-efficiency Millimeter-wave Antenna on a Thick Resin on a Silicon Chip and Development of the Measurement Systems

我们设计并制作了一个同轴馈电的圆极化贴片天线，该天线是在一个200 μ m厚的树脂片上实现的，该树脂片位于一个5 mm见方的硅片上，硅片上覆有2 μ m厚的铜。用混响室测量了天线的辐射效率，测量不确定度为± 3%。计算结果为75%，与设计值吻合良好。320 μ m长的同轴结构的损耗为0.2dB。我们还开发了使用50 GHz频段光纤测量辐射模式的系统。

We have designed and fabricated a circularly-polarized patch antenna fed by coaxial structure through a hole, which is realized on a 200um-thick resin over a 5mm-square silicon chip coated with 2um-thick copper. The radiation efficiency of the antenna is measured by a reverberation chamber with uncertainty of ±3％. It is 75% and has good agreement with the designed value. The loss of the 320um-long coaxial structure has been confirmed to be 0.2dB. We have also developed the system to measure radiation patterns using optical fibers in the 50GHz band.