A Smart Image Sensor in Eye-Sage Band with Demodulation Function

具有解调功能的Eye-Sage频段智能图像传感器

• 批准号: 13450144
• 负责人: OHTA Jun
• 金额: $ 9.41万
• 依托单位: Nara Institute of Science and Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450144/
• 关键词: CMOS Image Sensor; Demodulation; Photo-gate; Eye-safe; Vision Chip; Active Pixel Sensor; 振り分け転送; アイセーフ帯

An image sensor with an in-pixel demodulation function for detecting modulated light is proposed and demonstrated. The pixel has two floating diffusion regions, one of which stores charges produced by static illumination, and the other stores charges produced by both static and modulated illumination. By subtracting the two outputs, images produced only by the modulated illumination can be obtained. Based on the proposed circuit, an image sensor with 64 x 64 pixels is lubricated using a 0.6μm 2-poly 3-metal CMOS technology. Using this sensor, we successfully demonstrate the extraction of the modulated component of images under constant illumination conditions. In addition, for the application of motion capture, we demonstrate that a marker, which is a modulated light source, can be extracted from a captured image under several light conditions by using this sensor. Finally, means of improving the characteristics of charge transfer efficiency are discussed.We have also demonstrated an image sensor using SiGe BiCMOS fabrication process for detecting object illuminated by light in "eye-safe" band. The fabrication process is general 0.8μm 2-poly 2-metal SiGe BiCMOS process for RF application. SiGe-Si photodiodes and Si-SiGe-Si hetero-phototransistors as well as Si homojunction photodiodes and phototransistors have been fabricated and measured. The gain of the hetero-phototransistor was around 100. There was little difference between the sensitivity characteristics of SiGe and Si photodetectors. An image sensor with 32x32 pixels has been fabricated using a phototransistor as a detector, which of the base is made of SiGe layer. The dynamic range was 23 dB and the minimum detectable light intensity was 10 lux. We have successfully quired images by using this image sensor. The future issues to use SiGe BiCMOS process for image sensors are discussed.

提出并演示了一种具有像素内解调功能的图像传感器，用于检测调制光。像素具有两个浮动扩散区，其中一个存储由静态照明产生的电荷，且另一个存储由静态照明和调制照明两者产生的电荷。通过将两个输出相减，可以获得仅由调制照明产生的图像。在此基础上，采用0.6μ m2-poly 3-metal CMOS工艺实现了64 × 64像素的图像传感器。使用这种传感器，我们成功地证明了在恒定照明条件下的图像的调制分量的提取。此外，对于运动捕捉的应用，我们证明了一个标记，这是一个调制光源，可以通过使用这种传感器在几种光照条件下从捕获的图像中提取。最后，讨论了提高电荷传输效率的方法，并设计了一种基于SiGeBiCMOS工艺的图像传感器，实现了对人眼安全范围内的物体的检测。该器件采用通用的0.8μ m2-poly 2-metal SiGe BiCMOS工艺制作。制作并测量了SiGe-Si光电二极管和Si-SiGe-Si异质结光电晶体管以及Si同质结光电二极管和光电晶体管。异质光电晶体管的增益约为100。SiGe和Si光电探测器的灵敏度特性之间几乎没有差异。用光电晶体管作为探测器，制作了一个32 × 32象素的图象传感器，其基极是SiGe层。动态范围为23 dB，最小可检测光强度为10勒克斯。我们已经成功地利用这种图像传感器获取图像。讨论了SiGe BiCMOS工艺在图像传感器中的应用前景。

项目成果

K.Yamamoto, et al.: "Application of a frequency-demodulation image sensor to motion capturing"Int'l Conf.Optics-Photonoics Design & Fabrication. 91-92 (2002)

K.Yamamoto 等人：“频率解调图像传感器在运动捕捉中的应用”国际光学-光子学设计会议

山本 幸司, 香川 景一郎, 太田 淳, 布下 正宏, 山嵜 康司, 渡辺 國寛: "変調光検波イメージセンサによるマーカー検出"秋季応物学会講演予稿集. 25p-ZN-7. 880 (2002)

Koji Yamamoto、Keiichiro Kakawa、Jun Ota、Masahiro Funoshita、Koji Yamazaki、Kunihiro Watanabe：“使用调制光检测图像传感器进行标记检测”秋季生物科学会议论文集（25p-ZN-7）。

K.Yamamoto, T.Hirai, K.Kagawa, J.Ohta, M.Nunoshita, M.Yamada, Y.Yamasaki, S.Sugishita, K.Watanabe: "A vision chip with an in-pixel demodulation function for detecting a modulated light signal"Optics in Computing 2002. (発表予定).

K.Yamamoto、T.Hirai、K.Kakawa、J.Ohta、M.Nunoshita、M.Yamada、Y.Yamasaki、S.Sugishita、K.Watanabe：“具有像素内解调功能的视觉芯片，用于检测调制光信号”计算中的光学 2002 年。（待提交）。

J.Ohta, et al.: "Improvement of saturation characteristics of a frequency-demodulation CMOS image sensor"Asia and south Pacific Desigh Automation Conference. 575-576 (2004)

J.Ohta 等人：“频率解调 CMOS 图像传感器饱和特性的改进”亚洲和南太平洋设计自动化会议。

山本 幸司, 香川 景一郎, 太田 淳, 布下 正宏, 山嵜 康司, 山田 雅司, 渡辺 國寛: "変調光検波方式イメージセンサの〜画像特性〜"映情学会年次大会講演予稿集. 15-1(講演番号)(CD-ROM). (2002)

Koji Yamamoto、Keiichiro Kakawa、Jun Ota、Masahiro Funoshita、Koji Yamazaki、Masashi Yamada、Kunihiro Watanabe：“调制光检测型图像传感器的图像特性”日本技术学院年会论文集（讲座号15-1） ）（光盘）（2002）。