Evaporation system with glovebox for metals and reactive materials

金属薄膜广泛应用于基础材料研究和构建功能器件，如光学传感器，太阳能电池和THz天线。结构化金属电极促进了对功能纳米材料如2D半导体的研究。此外，高活性材料薄膜还用于电池、太阳能电池和催化剂的能源研究。这套创新灵活的蒸发系统配有专用手套箱，可处理高达6”的晶圆衬底，是锡根大学中央纳米制造设施的主要设备之一。这一核心设施及其洁净室系统地为科学技术学院及其他学院的所有研究人员提供了访问机会。北莱茵-威斯特伐利亚州与该大学正在将其整合到一个新的纳米科学中心，该中心拥有现代化的600平方米ISO 4洁净室。该战略是将该大学用于传感器系统中心，微米和纳米化学与工程中心以及多学科创新材料中心的材料和设备开发的纳米结构基础设施合并在DFG资助的微米和纳米分析核心设施MNaF的明确共享方法下。这一战略预计可持续和有效地利用这种沉积工具和所有其他纳米技术仪器，在最好的科学水平，与专业的支持人员，专业优化所涉及的过程，和系统的用户访问组织/培训。沉积工具与其他制造仪器以及纳米分析实验室的紧密邻近允许对环境敏感或甚至反应性材料（例如，相变或能量材料。因此，从材料合成到最终器件应用或表征的整个工艺链都可以在低温和/或高真空条件下进行，并在各个仪器之间提供适当的传输机制。沉积工具配备了一个电子束和两个热蒸发器，用于后续蒸发和共蒸发。它配备了一个等离子体源，带有气体入口，用于基板清洁，如果适用，用于钝化高活性薄膜，以及柔性基板保持器和加热。为了能够研究高活性材料，引入所需的蒸发源和衬底以及所有的处理，空气必须系统地排除。因此，该工具配备了专用的惰性气体手套箱，允许通过单独的门进入蒸发室（保持常规操作）。为了直接将反应性/敏感性样品转移到其他制造或表征工具，沉积室还配备了真空负载锁。此设置的低温/真空传输梭与此捆绑包的其他仪器兼容。

Metallic thin films are manifold employed for fundamental materials research and to build functional devices like optical sensors, solar cells and THz antennas. Structured metallic electrodes facilitate the research on functional nanomaterials like 2D semiconductors. Moreover, thin films of highly reactive materials are utilized for our energy research on batteries, solar cells and catalysts.This innovative and flexible evaporation system with dedicated glovebox for processing up to 6” wafer substrates is one major instrument of the central nanofabrication facility at the University of Siegen. This core facility with its clean room systematically provides access to all researchers of the School of Science and Technology and beyond. The state of North Rhine-Westphalia together with the university is integrating this into a new nanoscience center with a modern 600m2 ISO 4 clean room. The strategy is to merge the university’s nanofabrication infrastructure for materials and device development at the Center for Sensor Systems, the Center for Micro- and Nanochemistry and Engineering and the Multidisciplinary Center for Innovative Materials under the clear sharing methodology of the DFG-funded Micro- and Nanoanalytics Core Facility MNaF. This strategy anticipates a sustainable and efficient use of this deposition tool and all other nanotechnological instruments, at the best scientific level, with specialized support personnel, a professional optimization of the involved processes, and a systematic user access organization/training. The close vicinity of the deposition tool to other fabrication instrumentation as well as to the nanoanalytical laboratories allows the efficient development of highly topical research on environmentally sensitive or even reactive materials, e.g., phase-change or energy materials. Therefore, the whole process chain from material’s synthesis to its final device application or characterization will be possible under cryogenic and/or high-vacuum conditions with adequate transport mechanisms between individual instruments.The deposition tool is equipped with one e-beam and two thermal evaporators for subsequent and co-evaporation. It comes with a plasma source with gas inlet for substrate cleaning and, if applicable, to passivate highly reactive thin films as well as a flexible substrate holder and heating. To enable the research on highly reactive materials, the introduction of the needed evaporation source and substrates as well as the handling of all, air has systematically to be excluded. Therefore, the tool is equipped with a dedicated inert-gas glovebox that allows to access the evaporation chamber through a separate door (routine operation maintained). To directly transfer reactive/sensitive samples to other fabrication or characterization tools, the deposition chamber is further equipped with a vacuum load lock. The cryo/vacuum transfer shuttle of this setup is compatible to the other instruments of this bundle.