Reactive evaporation system for oxides and nitrides

用于氧化物和氮化物的反应蒸发系统

• 批准号: 466658236
• 金额: --
• 依托单位: Universität Siegen
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2021
• 资助国家: 德国
• 起止时间: 2020-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/466658236?language=en
• 关键词: Reactive; evaporation; system; oxides; nitrides

Stoichiometric thin films and heterostructures of various metal oxides or nitrides are a fundamental requirement for advanced materials research and to develop novel functional (opto-)electronic devices and sensors.This reactive magnetron sputter tool for processing up to 6” wafer substrates is one major instrument of the central nanofabrication facility at the University of Siegen. This core facility with its clean room systematically provides access to all researchers of the School of Science and Technology and beyond. The state of North Rhine-Westphalia together with the university is integrating this into a new nanoscience center with a modern 600m2 ISO 4 clean room. The strategy is to merge the university’s nanofabrication infrastructure for materials and device development at the Center for Sensor Systems, the Center for Micro- and Nanochemistry and Engineering and the Multidisciplinary Center for Innovative Materials under the clear sharing methodology of the DFG-funded Micro- and Nanoanalytics Core Facility MNaF. This strategy anticipates a sustainable and efficient use of this deposition tool and all other nanotechnological instruments, at the best scientific level, with specialized support personnel, a professional optimization of the involved processes, and a systematic user access organization/training. The close vicinity of the deposition tool to other fabrication instrumentation as well as to the nanoanalytical laboratories allows the efficient development of highly topical research on environmentally sensitive or even reactive materials, e.g., phase-change or energy materials. Therefore, the whole process chain from material’s synthesis to its final device application or characterization will be possible under cryogenic and/or high-vacuum conditions with adequate transport mechanisms between individual instruments.This evaporation system will dominantly be utilized to deposit stoichiometric ceramic thin films and heterostructures with defined properties. Such thin films are utilized to build optical/biological sensors, electrochemical devices and functional MEMS-based chips for in situ studies at the MNaF. Moreover, they enable fundamental research on novel materials. The broad spectrum of research topics includes ion conduction in ceramics, phase stability under harsh operation conditions, functional properties of 2D semiconductors, spin orbitronics, optical and bio-sensors as well as (dye) solar cells.The deposition tool will be equipped with two electron-beam evaporators, a plasma source for substrate cleaning as well as the reactive deposition of stoichiometric thin films and multilayers. Moreover, it comes with a flexible substrate holder and heating. To facilitate the research on reactive specimens, the instrument will additionally be equipped with a dedicated vacuum load lock. The mandatory transfer shuttle is part of another related proposal of this bundle.

化学计量比薄膜和各种金属氧化物或氮化物的异质结构是先进材料研究和开发新型功能(光电)电子器件和传感器的基本要求。这种反应磁控溅射工具用于处理多达6英寸的晶片衬底，是锡根大学中央纳米制造设施的主要仪器之一。这一核心设施及其洁净室系统地向科学和技术学院及其他地方的所有研究人员提供通道。北莱茵-威斯特伐利亚州和该大学正在将其整合到一个新的纳米科学中心，该中心拥有一个现代化的600平方米的ISO 4无尘室。该战略是在DFG资助的微纳分析核心设施MNaF的明确共享方法下，将大学用于材料和设备开发的纳米制造基础设施合并在传感器系统中心、微纳米化学和工程中心以及创新材料多学科中心。这一战略预期在最好的科学水平上可持续和有效地使用这一沉积工具和所有其他纳米技术工具，配备专门的支助人员，对所涉及的过程进行专业优化，并建立系统的用户准入组织/培训。沉积工具靠近其他制造仪器以及纳米分析实验室，这使得对环境敏感甚至是反应性材料，例如相变材料或能源材料的高度专题研究得以有效开展。因此，从材料的合成到最终器件的应用或表征的整个过程链将可能在低温和/或高真空条件下实现，单个仪器之间有足够的传输机制。这种蒸发系统将主要用于沉积具有特定性质的化学计量比陶瓷薄膜和异质结构。这种薄膜被用来建造光学/生物传感器、电化学设备和基于MEMS的功能性芯片，用于MNaF的现场研究。此外，它们还使新材料的基础研究成为可能。广泛的研究课题包括陶瓷中的离子传导，严酷操作条件下的相稳定性，2D半导体的功能特性，自旋轨道电子学，光学和生物传感器以及(染料)太阳能电池。沉积工具将配备两个电子束蒸发器，一个用于衬底清洁的等离子体源，以及化学计量薄膜和多层膜的反应沉积。此外，它还配备了灵活的基板支架和加热装置。为了方便对反应性样品的研究，该仪器将另外配备一个专用的真空加载锁。强制换乘班车是这一捆绑方案中另一项相关提案的一部分。