Reactive evaporation system for oxides and nitrides

化学计量薄膜和各种金属氧化物或氮化物的异质结构是先进材料研究和开发新型功能（光）电子器件和传感器的基本要求。这款用于处理高达6”晶片衬底的反应磁控溅射工具是锡根大学中心纳米制造设施的主要仪器之一。这一核心设施及其洁净室系统地为科学技术学院及其他学院的所有研究人员提供了访问机会。北莱茵-威斯特伐利亚州与该大学正在将其整合到一个新的纳米科学中心，该中心拥有现代化的600平方米ISO 4洁净室。该战略是将该大学用于传感器系统中心，微米和纳米化学与工程中心以及多学科创新材料中心的材料和设备开发的纳米结构基础设施合并在DFG资助的微米和纳米分析核心设施MNaF的明确共享方法下。这一战略预计可持续和有效地利用这种沉积工具和所有其他纳米技术仪器，在最好的科学水平，与专业的支持人员，专业优化所涉及的过程，和系统的用户访问组织/培训。沉积工具与其他制造仪器以及纳米分析实验室的紧密邻近允许对环境敏感或甚至反应性材料（例如，相变或能量材料。因此，从材料合成到最终器件应用或表征的整个工艺链都可以在低温和/或高真空条件下进行，并在各个仪器之间提供适当的传输机制。这种蒸发系统将主要用于沉积具有特定性能的存款化学计量陶瓷薄膜和异质结构。这种薄膜被用来构建光学/生物传感器，电化学设备和功能MEMS为基础的芯片在MNaF的原位研究。此外，它们还可以对新材料进行基础研究。研究课题范围广泛，包括陶瓷中的离子传导、苛刻操作条件下的相稳定性、二维半导体的功能特性、自旋轨道电子学、光学和生物传感器以及（染料）太阳能电池。沉积设备将配备两个电子束蒸发器、一个用于基板清洁的等离子体源以及化学计量薄膜和多层膜的反应沉积。而且，它还配有柔性基板保持器和加热。为了便于对反应性样品的研究，该仪器还将配备专用的真空加载锁。强制性的接送班车是这一捆绑的另一个相关提案的一部分。

Stoichiometric thin films and heterostructures of various metal oxides or nitrides are a fundamental requirement for advanced materials research and to develop novel functional (opto-)electronic devices and sensors.This reactive magnetron sputter tool for processing up to 6” wafer substrates is one major instrument of the central nanofabrication facility at the University of Siegen. This core facility with its clean room systematically provides access to all researchers of the School of Science and Technology and beyond. The state of North Rhine-Westphalia together with the university is integrating this into a new nanoscience center with a modern 600m2 ISO 4 clean room. The strategy is to merge the university’s nanofabrication infrastructure for materials and device development at the Center for Sensor Systems, the Center for Micro- and Nanochemistry and Engineering and the Multidisciplinary Center for Innovative Materials under the clear sharing methodology of the DFG-funded Micro- and Nanoanalytics Core Facility MNaF. This strategy anticipates a sustainable and efficient use of this deposition tool and all other nanotechnological instruments, at the best scientific level, with specialized support personnel, a professional optimization of the involved processes, and a systematic user access organization/training. The close vicinity of the deposition tool to other fabrication instrumentation as well as to the nanoanalytical laboratories allows the efficient development of highly topical research on environmentally sensitive or even reactive materials, e.g., phase-change or energy materials. Therefore, the whole process chain from material’s synthesis to its final device application or characterization will be possible under cryogenic and/or high-vacuum conditions with adequate transport mechanisms between individual instruments.This evaporation system will dominantly be utilized to deposit stoichiometric ceramic thin films and heterostructures with defined properties. Such thin films are utilized to build optical/biological sensors, electrochemical devices and functional MEMS-based chips for in situ studies at the MNaF. Moreover, they enable fundamental research on novel materials. The broad spectrum of research topics includes ion conduction in ceramics, phase stability under harsh operation conditions, functional properties of 2D semiconductors, spin orbitronics, optical and bio-sensors as well as (dye) solar cells.The deposition tool will be equipped with two electron-beam evaporators, a plasma source for substrate cleaning as well as the reactive deposition of stoichiometric thin films and multilayers. Moreover, it comes with a flexible substrate holder and heating. To facilitate the research on reactive specimens, the instrument will additionally be equipped with a dedicated vacuum load lock. The mandatory transfer shuttle is part of another related proposal of this bundle.