权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of Supersonic Free-Jet PVD with Fluidic Mixer

流体混合器超音速自由射流 PVD 的开发

基本信息

批准号：
17560639
负责人：
FUJIO Hiroki
金额：
$ 2.11万
依托单位：
Kogakuin University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-17560639/
关键词：
Coaxial impinging jets Oscillation Phenomena Fluidic device Supersonic gas flow Nanoparticle Fluidic Mixer Coating

项目摘要

Recently, requirements for structural materials become increasingly severe. A coating process is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have following major technical problems. We develop Supersonic Free-Jet PVD (SFJ-PVD) as a new coating process to solve the problems. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated to supersonic velocity by a specially designed supersonic nozzle joined to the tip of the transfer pipe. In the vacuum deposition chamber, the nanoparticles are deposited onto the substrate. The velocity of the gas flow is one of the most important parameters in the SFJ-PVD. In order to increase gas velocity, we designed one-dimensional nozzles and a two-dimensional nozzle. We evaluate the effects of the nozzles on the properties of metal coating films with the SFJ-PVD.

近年来，对结构材料的要求越来越高。涂层工艺是实现这些要求的最有前途的方法之一。然而，常规的涂覆方法通常具有以下主要技术问题。我们开发了超音速自由喷射PVD（SFJ-PVD）作为一种新的涂层工艺来解决这些问题。SFJ-PVD是利用超音速气流来存款纳米颗粒并形成没有裂纹或空隙的厚涂膜的技术。该方法由“气体蒸发”和“真空沉积”组成。在气体蒸发室中，在惰性气体气氛中蒸发源材料以形成纳米颗粒。然后在沉积室中用惰性气体流通过转移管将纳米颗粒运送到衬底。气流由腔室之间的压力差产生，并通过连接到传输管尖端的特别设计的超音速喷嘴加速到超音速。在真空沉积室中，纳米颗粒被沉积到基底上。气流速度是SFJ-PVD中最重要的参数之一。为了提高气流速度，我们设计了一维喷嘴和二维喷嘴。我们评估了喷嘴对SFJ-PVD金属涂层性能的影响。