Development of Supersonic Free-Jet PVD with Fluidic Mixer

流体混合器超音速自由射流 PVD ​​的开发

• 批准号: 17560639
• 负责人: FUJIO Hiroki
• 金额: $ 2.11万
• 依托单位: Kogakuin University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-17560639/
• 关键词: Coaxial impinging jets; Oscillation Phenomena; Fluidic device; Supersonic gas flow; Nanoparticle; Fluidic Mixer; Coating

Recently, requirements for structural materials become increasingly severe. A coating process is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have following major technical problems. We develop Supersonic Free-Jet PVD (SFJ-PVD) as a new coating process to solve the problems. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated to supersonic velocity by a specially designed supersonic nozzle joined to the tip of the transfer pipe. In the vacuum deposition chamber, the nanoparticles are deposited onto the substrate. The velocity of the gas flow is one of the most important parameters in the SFJ-PVD. In order to increase gas velocity, we designed one-dimensional nozzles and a two-dimensional nozzle. We evaluate the effects of the nozzles on the properties of metal coating films with the SFJ-PVD.

最近，对结构材料的要求越来越严重。涂料过程是达到要求的最有前途的方法之一。但是，常规涂料工艺通常存在重大技术问题。我们开发超音速自由喷气PVD（SFJ-PVD）作为解决问题的新涂料过程。 SFJ-PVD是一种用超音速气流沉积纳米颗粒并形成没有裂缝或空隙的厚涂层的技术。该方法由“气体蒸发”和“真空沉积”组成。在气体蒸发室中，蒸发材料在惰性气气大气中形成纳米颗粒。然后将纳米颗粒带到沉积室中的底物，并带有通过转移管道的惰性气体流动。气流是由腔室之间的压力差产生的，并通过特殊设计的超音速喷嘴加速到超音速速度，该喷嘴连接到传输管道的尖端。在真空沉积室中，将纳米颗粒沉积在基板上。气流的速度是SFJ-PVD中最重要的参数之一。为了提高气体速度，我们设计了一维喷嘴和二维喷嘴。我们评估了喷嘴对SFJ-PVD金属涂层膜性能的影响。

项目成果

超音速フリージェットPVDによる金属膜の形成と密着性評価

超音速自由喷射PVD金属膜的形成及附着力评估

• 发表时间: 2007
• 期刊: 溶射技術 26巻・2号
• 作者: 湯本;廣木;塩田;丹羽
• 通讯作者: 丹羽

超音速フリージェットPVDによる傾斜組成皮膜の形成

超音速自由喷射PVD形成梯度复合膜

• 发表时间: 2005
• 期刊: 傾斜機能材料論文集
• 作者: 湯本;山本;廣木;塩田;丹羽
• 通讯作者: 丹羽

Development of Micro Fluidic Device

微流控装置的开发

• 发表时间: 2005
• 期刊: Fluid Control,. Measurement and Visualization (CD-ROM)
• 作者: T.Tanaka;F.Hiroki;A.Yumoto;K;Yamamoto
• 通讯作者: Yamamoto

Mixing Chamber Utilizing Oscillation Phenomena of Coaxial Impinging Jet

利用同轴冲击射流振荡现象的混合室

• 发表时间: 2005
• 期刊: Fluid Control, Measurement and Visualization (CD-ROM)
• 作者: H.Takasashi;F.Hiroki;A.Yumoto;K.Yamamoto
• 通讯作者: K.Yamamoto

燐酸カルシウム粒子分散チタン膜

磷酸钙颗粒分散钛膜

• 发表时间: 2007