Basic development of high sensitivity, large format and inexpensive near-infrared image sensor

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We made performance evaluations of InGaAs near-infrared image sensor which are produced by Hamamatsu Photonics Co. Ltd. (HPK) under cold environment in collaboration with HPK. We tested a 64 x 64 pixels with 50 micron pitch array and 128 x 128 pixels with 20 micron pitch array sensors. Before testing the sensors, we developed a vacuum-cooling dewar which is dedicated to performance evaluation of optical-infrared image sensors and a sensor readout system. The evaluation system we developed is very versatile to be used for testing various types of optical-infrared image sensors. We found that 128 x 128 pixel sensor has a quantum efficiency of 80% in a wavelength region from 0.9 microns to 1.6 microns with a readout noise of 160 electrons. We fed back the results of our performance evaluation tests to the manufacturers, and define a direction to next development of new infrared image sensors.