Cross sections for electron scattering from molecules and radicals of technological and environmental relevance.

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We will use two state of the art crossed beam spectrometers to measure absolute differential and integral cross sections for low energy electron scattering from molecules and their molecular fragments (radicals). The species to be considered are those of significant industrial (e.g. C2F4, C4F8 and CF2) and environmental (e.g. CO2 and H2O) interest, with the cross sections we will measure being crucial to our modelling both the processes involved in plasma enhanced chemical vapour desposition of semiconductor devices and the spectral emission characteristics of planetary atmospheres. The modelling will be conducted self-consistently with our enhanced statistical equilibrium simulation code, which is unique to Australia.