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A Dynamic Zone Plate Interferometer for measuring Aspherical Surfaces

A Dynamic Zone Plate Interferometer for measuring Aspherical Surfaces
用于测量非球面的动态波带片干涉仪
批准号:
61420020
负责人:
TSUJIUCHI Jumpe
金额:
$7.42万
依托单位国家:
日本
项目类别:
Grant-in-Aid for General Scientific Research (A)
财政年份:
1986
资助国家:
日本
项目状态:
已结题
起止时间:
1986 至 1987

项目摘要

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中文摘要
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英文摘要
Optical interierometers are quite useful for measuring the difference between the shape of an optical surface under test and that of a standard surface. But, conventional methods need considerable modification if the applications are to be extended : since the measurable maximum difference between surfaces is not large, it is quite difficult to obtain directly the error of aspherical surfaces. For this purpose, some special devices such as computer generated holograms or CGH are indispensable for obtaining the deformed or aspherical standard wavefronts.A dynamic zone plate interferometer (DZPI) being studied in this project can measure such surfaces without any need of either CGH or standard surface. The wavelength of the light source is changed in DZPI to generate a series of reference spheres with different radii, Since each interferogram shows the optical path difference between the surface of the optical element under test and one of the many reference shperes, both shape and surfa … More ce error can be calculated from a series of interierograms taken at different wavelengths.Two parabolic mirrors, whose F-numbers are 3 and 4, are experimentally measured As a light source, a ring dye laser is utilized. At each wavelength, an interferogram is recorded and sent to a computer to be processed. Because of the discontinuity of the wavelength change, it is difficult to use a conventional technique for fringe analysis. Then, a Fourier analysis in a continuous space is developed and applied, A theoretical analysis concludes that Fourier method become equivalent to the least square method for a certain set of the parameters used in the analysis.The phase determination error of the proposed method is also theoretically analzed in case of additive noise and nonlinear response through the observation system. It is shown that the measurement error can be minimized with a selection of appropriate system parameters. Experimental results ensure the feasibillity of the DZPI for measuring aspherical surfaces. Less
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N.Ohyama, I.Yamaguchi, I. Ichimura, J. Tsujicuchi and T. Honda: "A dynamic zone-plate interferometer for measuring aspherical surfaces" Optics Communications. 54. 257-261 (1985)
N.Ohyama、I.Yamaguchi、I. Ichimura、J. Tsujicuchi 和 T. Honda:“用于测量非球面的动态波带片干涉仪”光学通讯。
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N.Ohyama, T. Shimano, J. Tsujicuchi and T. Honda: "An Analysis of systematic phase errors due to nonlinearity in fringe scanning systems" Optics Communications. 58. 223-226 (1986)
N.Ohyama、T. Shimano、J. Tsujicuchi 和 T. Honda:“条纹扫描系统非线性导致的系统相位误差分析”光学通讯。
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T. Shimano, N. Ohyama, J. Tsujiuchi and T. Honda: "Analysis of systemtic errors in the dynamic zone-plate interferometer" Optics Communications. 64. 1-3 (1987)
T. Shimano、N. Ohyama、J. Tsujiuchi 和 T. Honda:“动态波带片干涉仪中的系统误差分析”光学通讯。
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N.Ohyama: J.O.S.A.(A).
N.Ohyama:J.O.S.A.(A)。
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