权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Discharge-Pumped Rare Gas Excimer Lasers in the VUV Region.

VUV 区域的放电泵浦稀有气体准分子激光器。

基本信息

批准号：
62550042
负责人：
WATARU Sasaki
金额：
$ 1.47万
依托单位：
University of Osaka Prefecture
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1987
资助国家：
日本
起止时间：
1987 至 1988
项目状态：
已结题

项目摘要

We have newly designed and built a high pressure laser tube, and have extensively studied the excitation mechanism of rare gas excimers produced by electrical discharge and the mixing process of the singlet and triplet states. The obtained results are as follows: (1) The continuum of the argon excimer spreads over a spectral range from 90nm to 146nm, which is wider than that produced by electron beam. (2) The continuum has the peak at 126nm, and the peak intensity increases as a function of 1. 2 powers of the argon pressure. (3) In the pressure range below 1 atm, the energy transfer from the triplet state to the singlet one is caused by electron collision process. (4) Above 1 atm, a two body collision process between the excimer and the atom in the ground state becomes important. (5) The electron density in the discharge plasma is estimated to be less than 1010cm-3, which is much lower than the value of 1013cm-3 in the electron beam produced plasma.We have also stdied the corona discharge-type preionization, and found that it is not strong enough to generate homogeneous discharge between the clectrodes. We have also found that SiC chemical vapor deposition film and Mo single crystal are most suitable materials for the cavity mirrors.

我们新设计和制造了高压激光管，并对放电产生的稀有气体准分子的激发机制以及单态和三态的混合过程进行了广泛的研究。结果表明：(1)Ar准分子的连续谱分布在90~146 nm的光谱范围内，比电子束产生的谱宽。(2)连续谱在126 nm处有峰值，峰值强度随Ar气压的1.2次方而增大。(3)在低于1大气压的压力范围内，三重态到单重态的能量转移是由电子碰撞过程引起的。(4)在1大气压以上，准分子与基态原子之间的两体碰撞过程变得重要。(5)放电等离子体中的电子密度估计小于1010 cm-3，远低于电子束产生的等离子体中的1013 cm-3。我们还研究了电晕放电型预电离，发现它不足以在电极之间产生均匀的放电。我们还发现，碳化硅化学气相沉积薄膜和钼单晶是最适合制作腔镜的材料。