Aggregation Structure and Gas Separation Properties of Double-layer membranes Plasma-polymerized from Silicone Compounds and Perfluorobenzene

众所周知，在等离子体聚合化系统中对电子温度的控制在通过等离子体聚合化实现膜结构的可再生性方面是很重要的。这种双重探测方法是用来测量电子温度的。电子温度对放电系统的功率和压力都有很大影响。Besides，它被证明是对聚合反应的严重影响。一个电子温度的阴谋，对放电的力量显示出一个最低限度的点。在HMDS和HFB聚合化的情况下，压力为0.02 torr，最低点的放电功率为20瓦和40瓦，尊重。所有的等离子体聚合物操作都在这些最低限度地产生。获得的膜的气体渗透性已被测量和结构已使用扫描电子显微镜、红外光谱仪和X射线光电子光谱仪进行分析。就像结果一样，它找到了我的温度 ... More 等离子体聚合物下的离子体聚合物对膜和气体渗透特性的结构有很大的影响。膜聚合物从HMDS在20 ℃ C ，其中含有高速率的硅氧键和低速率的烷基组，更不是有机的和容易破裂的。但它在-5 ℃ C中含有一个高速率的烷基组，并且是一个有机基底类似于硅橡胶的有机基底。该薄膜的气体渗透率为2000-3000 A^，厚度为10^<-4> cc（STP）/cm 2·s·cmHg。氧气与氮气的分离比率几乎恒定在2.0，在薄膜厚度的宽范围内0。然后， Doxgble-layer membranes将HFB层的500-1000 A ^是制造的。通过该膜，氧的渗透率为7 x10 ^&lt;-5&gt; cc（STP）/cm 2·s·cmHg和分离率（R_<O2>/F_<N2>）大于2.5。这些结果提出的是，在目前的研究中，双层薄膜有很大的潜力成为增强氧活性的薄膜。Less（低）

It was known that the control of electron temperature within plasma polymerization system was important in order to obtain reproducibility of membrane structure by plasma polymerization. The double probe method was used to measure the electron temperature. Electron temperature was delicately affected by both power and pressure of the discharge system. Besides, it exerted seriously a influence upon polymerization reaction. A plot of the electron temperature against the power of discharge showed a minimum point. In the cases of polymerization of HMDS and HFB at the pressure of 0.02 torr, the minimum point was observed at discharge power of 20 W and 40 W, respectively. All the operation of plasma polymerization were carried out at these minimum points. Gas permeability of obtained membrane was measured and structure of membrane was analyzed using scanning electron microscope, infrared spectometry and X-ray photoelectron spectroscopy. As the results, it was found that the temperature of me … More mbrane under plasma polymerization had a great influence on the structure of membrane and gas permeation properties. Membrane polymerized from HMDS at 20 ﾟC , which contained a high rate of siloxane bond and a low rate of alkyl groups, was rather inorganic and easy to crack. But that polymerized at - 5 ﾟC contained a high rate of alkyl groups and was an organic substrate similar to the silicon rubber. The gas permeation rate of this membrane, which was 2000-3000 A^^ﾟ in thickness, was the order of 10^<-4> cc(STP)/cm^2・s・cmHg. Separation ratio of oxygen to nitrogen was almost constant at 2.0 in the wide range of the thickness 0of membrane. Then, doxgble-layer membranes which put HFB layer of 500-1000 A^^ﾟ on HMDS layer of 2500 A^^ﾟ Were made. The permeation rate of oxygen through this membrane was 7 x 10^<-5> cc(STP)/cm^2・s・cmHg and the separation ratio(R_<O2>/F_<N2>) was more than 2.5. These results suggest that, the double-layer membrane in present study have high potential to be the practical membrane for oxygen enrichment. Less