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Scanning Capacitance microscope

扫描电容显微镜

基本信息

批准号：
02555081
负责人：
TAMURA Shinichi
金额：
$ 4.35万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1992
项目状态：
已结题

项目摘要

The objective of this research is to develop a scanning capacitance microscope which has although lower resolution power than STM and electron microscope, but has higher resolution power than optical microscope. Then, it can provide images of objects coarser than those the former deals with and finer the latter deals with. Thus, it can be used as a zoom up function of an optical microscope, for example. There are several choices to realize it. We built a scanning capacitance microscope according to the following investigated results:(1) Scanning method: There are two types of scanning. One is stage driving method and the other is stylus driving method. We concluded that the latter is superior to the former from the view point of cross-talk noise and skewness.(2) Electro-static capacitance detection method: There are two types of the detection methods. One is a direct method and the other is differential capacitance method. We concluded that the latter is superior to the former from the … More view point of S/N ratio.(3) Additive vibration frequency: Initially 160 Hz was used as the additive vibration frequency of the differential capacitance method. Finally, however, 10 kHz is used, since the higher frequency is better from the view point of S/N ratio.(4) Signal detection method: There are two types of detection method. One is envelope detection method and the other is synchronous detection method. We concluded that the latter is superior to the former from the view point of S/N ratio and stability.(5) Z-axis driving method: There are two types of driving method. One is direct method which makes the detector output as the surface observation output image directly, and the other is 2.5 dimensional scanning method which outputs the stylus hight as the surface image when using hight-feedback so that the detector output is kept constant. We concluded that the latter is superior to the former from the view point of linearity and stability.Several images including metal and semiconductor surfaces are taken by using the microscope developed in this research. Less

本研究的目的是研制一种扫描电容显微镜，其分辨率虽然低于STM和电子显微镜，但高于光学显微镜。然后，它可以提供比前者处理的对象更粗糙，后者处理的对象更精细的图像。因此，例如，它可以用作光学显微镜的放大功能。实现它有几种选择。根据以下调查结果，我们建立了扫描电容显微镜：(1)扫描方法：扫描有两种类型。一种是阶段驱动法，另一种是手写笔驱动法。从串音噪声和偏度的角度来看，后者优于前者。(2)静电电容检测法：检测方法有两种。一种是直接法，另一种是差分电容法。从信噪比的角度来看，我们认为后者优于前者。(3)加性振动频率：初始采用160hz作为差分电容法的加性振动频率。最后，使用10khz，因为从信噪比的角度来看，频率越高越好。(4)信号检测方法：检测方法有两种。一种是包络检测法，另一种是同步检测法。从信噪比和稳定性的角度来看，后者优于前者。(5) z轴驱动方式：有两种驱动方式。一种是直接法，直接将探测器输出作为表面观测输出图像；另一种是2.5维扫描法，在使用高反馈的情况下，将笔尖高度输出为表面图像，使探测器输出保持恒定。从线性度和稳定性的角度来看，后者优于前者。利用本研究开发的显微镜拍摄了金属和半导体表面的若干图像。少