Surface-Acoustic-Wave Devices for Mobile Communication and a CAD System for the Design of Surface Acoustic Waves

用于移动通信的声表面波器件和用于设计声表面波的 CAD 系统

• 批准号: 03650316
• 负责人: KOSHIBA Masanori
• 金额: $ 1.15万
• 依托单位: Hokkaido University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650316/
• 关键词: Surface acoustic wave (SAW); SAW-interdigital transducer (SAW-IDT); Coupled mode theory; Finite element method; numerical analysis; CAD system; 等価回路法; モ-ド結合理論; CADシステム

The performance of a CAD system for the design of SAW (Surface Acoustic Wave) devices is limited to the accuracy of the simulation procedure. A precise simulation of SAW devices must take into account pure electric, acoustic, and mixed electroacoustic effects.In this research a coupled mode theory is developed for the analysis of excitation characteristics of SAW-IDT (Interdigital Transducer). Coupling and transduction coefficients of coupled mode equations can be theoretically determined by applying the FEM (Finite Element Method) to an infinite array corresponding to an electrically shorted or open IDT. The FEM is also used to calculate the static capacitance for one pair of IDTs. Therefore, in this approach, all the effects of piezoelectric perturbation, mechanical perturbation, energy storage, and anisotropy of a substrate are taken into account. Numerical examples are presented for the excitation characteristics of IDTs on several piezoelectric substrates such as 128^ﾟY-X LiNbO_3, X-112ﾟY LiTaO_3, 45ﾟX-Z Li_2B_4O_7, and 34ﾟY-X quartz. The computed results agree well with experimental results.

声表面波（SAW）器件设计CAD系统的性能受到仿真过程精度的限制。声表面波器件的精确模拟必须考虑纯电效应、声效应和电声混合效应，本文发展了耦合模理论，用于分析声表面波叉指换能器（SAW-IDT）的激励特性。耦合模方程的耦合系数和换能系数可以通过将FEM（有限元法）应用于与电短路或开路IDT相对应的无限阵列而在理论上确定。有限元法也被用来计算一对叉指换能器的静态电容。因此，在这种方法中，压电扰动，机械扰动，能量存储和基板的各向异性的所有影响都被考虑在内。本文给出了几种压电基片上叉指换能器的激励特性的数值例子，如128 μ Y-X的LiNbO_3，X-112 μ YLiTaO_3，45 μ X-Z的Li_2B_4O_7和34 μ Y-X的石英。计算结果与实验结果吻合较好。

项目成果

稲川 清: "ダブル電極形弾性表面波すだれ状電極の等価回路定数の理論的導出" 電気学会論文誌. 111ーC. 39-395 (1991)

Kiyoshi Inakawa：“双电极表面声波叉指电极的等效电路常数的理论推导”日本电气工程师学会会刊 111-C 39-395 (1991)。

M. Koshiba and K. Ohbuchi: "An Analysis of Surface-Acoustic-Wave Devices on Layered Substrates" Japanese Journal of Applied Physics. Vol. 31. 213-215 (1992)

M. Koshiba 和 K. Ohbuchi：“层状基底上的表面声波器件的分析”日本应用物理学杂志。

稲川 清: "ダブル電極形弾性表面波すだれ状電極の等価回路定数の理論的導出" 電気学会論文誌. 111-C. 390-395 (1991)

Kiyoshi Inakawa：“双电极表面声波叉指电极等效电路常数的理论推导”日本电气工程师学会会刊 111-C 390-395 (1991)。

K. Inagawa and M. Koshiba: "Theoretical Determination of Equivalent Circuit Parameters for Double Electrode SAW Interdigital Transducers" The Transactions of the Institute of Electrical Engineers of Japan. Vol. 111-C. 390-395 (1991)

K. Inakawa 和 M. Koshiba：“双电极 SAW 叉指换能器等效电路参数的理论确定”日本电气工程师学会会刊。

稲川 清: "ダブル電極形弾性表面波すだれ状電極の等:価回路定数の理論的導出" 電気学会論文誌. 111-C. 390-395 (1991)

Kiyoshi Inakawa：“双电极表面声波叉指电极等效电路常数的理论推导”日本电气工程师学会会刊111-C 390-395（1991）。