Surface-Acoustic-Wave Devices for Mobile Communication and a CAD System for the Design of Surface Acoustic Waves

用于移动通信的声表面波器件和用于设计声表面波的 CAD 系统

• 批准号: 03650316
• 负责人: KOSHIBA Masanori
• 金额: $ 1.15万
• 依托单位: Hokkaido University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650316/
• 关键词: Surface acoustic wave (SAW); SAW-interdigital transducer (SAW-IDT); Coupled mode theory; Finite element method; numerical analysis; CAD system; 等価回路法; モ-ド結合理論; CADシステム

The performance of a CAD system for the design of SAW (Surface Acoustic Wave) devices is limited to the accuracy of the simulation procedure. A precise simulation of SAW devices must take into account pure electric, acoustic, and mixed electroacoustic effects.In this research a coupled mode theory is developed for the analysis of excitation characteristics of SAW-IDT (Interdigital Transducer). Coupling and transduction coefficients of coupled mode equations can be theoretically determined by applying the FEM (Finite Element Method) to an infinite array corresponding to an electrically shorted or open IDT. The FEM is also used to calculate the static capacitance for one pair of IDTs. Therefore, in this approach, all the effects of piezoelectric perturbation, mechanical perturbation, energy storage, and anisotropy of a substrate are taken into account. Numerical examples are presented for the excitation characteristics of IDTs on several piezoelectric substrates such as 128^ﾟY-X LiNbO_3, X-112ﾟY LiTaO_3, 45ﾟX-Z Li_2B_4O_7, and 34ﾟY-X quartz. The computed results agree well with experimental results.

用于 SAW（表面声波）器件设计的 CAD 系统的性能受限于模拟过程的准确性。 SAW器件的精确仿真必须考虑纯电、声和混合电声效应。在本研究中，开发了一种耦合模式理论来分析SAW-IDT（叉指换能器）的激励特性。通过将 FEM（有限元法）应用于与电短路或开路 IDT 相对应的无限阵列，理论上可以确定耦合模式方程的耦合和换能系数。 FEM 还用于计算一对 IDT 的静态电容。因此，在这种方法中，考虑了压电扰动、机械扰动、能量存储和基底的各向异性的所有影响。给出了128^ﾟY-X LiNbO_3、X-112ﾟY LiTaO_3、45ﾟX-Z Li_2B_4O_7和34ﾟY-X石英等几种压电基片上IDT激发特性的数值例子。计算结果与实验结果吻合良好。

项目成果

稲川 清: "ダブル電極形弾性表面波すだれ状電極の等価回路定数の理論的導出" 電気学会論文誌. 111ーC. 39-395 (1991)

Kiyoshi Inakawa：“双电极表面声波叉指电极的等效电路常数的理论推导”日本电气工程师学会会刊 111-C 39-395 (1991)。

M. Koshiba and K. Ohbuchi: "An Analysis of Surface-Acoustic-Wave Devices on Layered Substrates" Japanese Journal of Applied Physics. Vol. 31. 213-215 (1992)

M. Koshiba 和 K. Ohbuchi：“层状基底上的表面声波器件的分析”日本应用物理学杂志。

稲川 清: "ダブル電極形弾性表面波すだれ状電極の等価回路定数の理論的導出" 電気学会論文誌. 111-C. 390-395 (1991)

Kiyoshi Inakawa：“双电极表面声波叉指电极等效电路常数的理论推导”日本电气工程师学会会刊 111-C 390-395 (1991)。

K. Inagawa and M. Koshiba: "Theoretical Determination of Equivalent Circuit Parameters for Double Electrode SAW Interdigital Transducers" The Transactions of the Institute of Electrical Engineers of Japan. Vol. 111-C. 390-395 (1991)

K. Inakawa 和 M. Koshiba：“双电极 SAW 叉指换能器等效电路参数的理论确定”日本电气工程师学会会刊。

稲川 清: "ダブル電極形弾性表面波すだれ状電極の等:価回路定数の理論的導出" 電気学会論文誌. 111-C. 390-395 (1991)

Kiyoshi Inakawa：“双电极表面声波叉指电极等效电路常数的理论推导”日本电气工程师学会会刊111-C 390-395（1991）。