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MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONS

电子和离子群的机理及其应用

基本信息

批准号：
04302024
负责人：
TAGASHIRA Hiroaki
金额：
$ 2.37万
依托单位：
HOKKAIDO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Co-operative Research (A)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

The objective of the pesent research is to clarify the properties of electron and ion swarms in gases under electric and magnetic fields and to apply the properties to industrial development. Difficulties which the investigators faced were brought together and discussed at the scientific meetings held by the project team.The main achievements are as follows.As to collison cross sections which are the fundamental data for investigation of properties of the swarms, the magnitude of the ionization cross section of helium, the decay of super-excited hydrogen molecules through dissociation, and the electron density dependence of excitation and ionization in plasma were clarified. Also, from electron swarm data, the electron collision cross sections of the carbon dioxide, ethane and oxygen molecules were deduced.For clarification of electron swarm properties, the possibility of apperance of two peaks in the electron energy distribution in "Ramsauer gases", treatment of the collision term of Boltzmann equation, development of a numerical matrix analysis of Boltzmann equation and its application to initial relaxation and high frequency problem, swarm analysis by Flight Time Integral menthod, ion species identification by transverse flow drift technique, electronswarm parameter determination by pulsed laser induced photoelectron technique, and ion swarm parameter deduction by a Monte Carlo technique, were done.Applications of swarm properties were made in determination of spatio-temporal behavior of inductively coupled plasma by a relaxation continuum model, pulsed high frequency discharge observation and analysis, a space-and-time resolved study of a plasma display discharge cell by a microscope-laser spectroscopy, and reaction rate constant determination of radicals for silanes.

本研究的目的是阐明电场和磁场作用下气体中电子和离子群的性质，并将这些性质应用于工业发展。研究人员所面临的困难在项目组召开的科学会议上集中讨论，主要成果如下：作为研究群性质的基础数据的碰撞截面、氦的电离截面的大小、超激发氢分子的解离衰变、阐明了等离子体中激发和电离的电子密度依赖关系。从电子群数据出发，推导了CO2、乙烷和氧分子的电子碰撞截面，讨论了电子群的性质、“Ramsauer气体”中电子能量分布出现双峰的可能性、Boltzmann方程中碰撞项的处理方法，发展了Boltzmann方程的数值矩阵分析及其在初始松弛和高频问题中的应用，用飞行时间积分方法进行群分析，用横向流漂移技术识别离子种类，用脉冲激光诱导光电子技术确定电子群参数，用Monte Carlo技术推导离子群参数，用弛豫连续模型确定感应耦合等离子体的时空行为，脉冲高频放电观察和分析，通过显微镜-激光光谱法对等离子体显示器放电单元的空间和时间分辨研究，以及硅烷自由基的反应速率常数测定。