DEVELOPMENT OF SOLID CAPACITOR WITH CONDUCTING ORGANIC THIN FILMS AS ELECTROLYTE BY ION-BEAM-ASSISTED DEPOSITION

本研究的成果总结如下。提出了一种利用考夫曼型离子源进行离子束辅助沉积有机材料的新方法。与传统的蒸发法制备的TCNQ复合膜相比，该方法制备的TCNQ复合膜的质量有了很大的提高。在束流为60~90 nA/cm~2的范围内，当束流能量为100 eV时，在270 mm的离子源-衬底距离下，获得了最大电容。用离子束辅助法制备的TCNQ络合物制备的有机固体电容器具有理想的阻抗频率依赖性，最高可达10 6 Hz，与液体电解液的电容器相反。此外，蒸发的TCNQ复合膜还显示出较高的电子电导。其频率特性与使用可熔TCNQ络合物和导电聚合物的有机固体电容器相同。

The results of this research are summarized as follows.1. A new method of the ion-beam-assisted deposition of organic materials using the Kaufman-type ion source was proposed.2. The quality of TCNQ complex films prepared by this method was confirmed to be greatly improved compared with that obtained with the conventional evaporation method.3. The maximum capacitance was obtained in the range of the ion beam current between 60 nA/cm^2 and 90 nA/cm^2 for the ion beam energy of 100 eV under the ion source-substrate distance of 270mm using helium ion beams.4. Organic solid capacitors fabricated utilizing the TCNQ complex by ion-beam-assisted method exhibted the ideal frequency dependence of impedance up to 10^6Hz, contrary to the capacitor with the liquid electrolyte. Also, the evaporated TCNQ complex films Confirmed to exhibit high electronic conduction.5. The frequency characteristics is the same with those of the organic solid capacitors using a fusible TCNQ complex and also conducting polymers.