DEVELOPMENT OF SOLID CAPACITOR WITH CONDUCTING ORGANIC THIN FILMS AS ELECTROLYTE BY ION-BEAM-ASSISTED DEPOSITION

本研究的主要结果如下：1.提出了一种基于考夫曼型离子源的离子束辅助沉积有机材料的新方法.与传统蒸发法相比，该方法制备的TCNQ复合膜的质量有了很大的提高.采用氦离子束，在离子源-基片距离为270 mm，离子束能量为100 eV，束流为60 ~ 90 nA/cm ^2时，获得了最大电容.利用离子束辅助法制备的TCNQ复合物有机固体电容器的阻抗与频率的关系最高可达10^6Hz，与液体电解质的电容器相反。此外，蒸镀的TCNQ络合物薄膜证实具有高的电子导电性.频率特性与使用可熔TCNQ络合物和导电聚合物的有机固体电容器相同。

The results of this research are summarized as follows.1. A new method of the ion-beam-assisted deposition of organic materials using the Kaufman-type ion source was proposed.2. The quality of TCNQ complex films prepared by this method was confirmed to be greatly improved compared with that obtained with the conventional evaporation method.3. The maximum capacitance was obtained in the range of the ion beam current between 60 nA/cm^2 and 90 nA/cm^2 for the ion beam energy of 100 eV under the ion source-substrate distance of 270mm using helium ion beams.4. Organic solid capacitors fabricated utilizing the TCNQ complex by ion-beam-assisted method exhibted the ideal frequency dependence of impedance up to 10^6Hz, contrary to the capacitor with the liquid electrolyte. Also, the evaporated TCNQ complex films Confirmed to exhibit high electronic conduction.5. The frequency characteristics is the same with those of the organic solid capacitors using a fusible TCNQ complex and also conducting polymers.