Trial Production of the Double-Knudsen Cell-Mass Spectrometer and Fundamental Study on Compound-Semiconductor Materials.

双克努森池质谱仪的试制及化合物半导体材料的基础研究。

• 批准号: 05555196
• 负责人: AZAKAMI Takeshi
• 金额: $ 12.16万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555196/
• 关键词: Mass spectrometer; Double Knudsen cell; Complex gas species; Vapor pressure; Ag-Ga system; Ga-As system; Cu-As system; Monomer-dimmer method; Belton-Fruehan式; Cu-S-As系; monomer-dimer法; クヌーセンセル; 化合物半導体; 電気炉

A mass spectrometer is the best method for the analysis of complex gas species such as arsenic which is a major element in the III-V semiconductors. A prototype of a double Knudsen cell - mass spectrometer which is constituted with double focusing mass analysis system and a small electric furnace contained the dual Knudsen cells has been made and was applied to measure the arsenic activities by comparing of ion intensities of arsenic between reference and activity unknown samples in the twin Knudsen cells. Several kind of studies were carried out for efficiency tests of the mass spectrometer and the following results have been obtained :1.The ionization potentials of residual gases and arsenic, and the heats of vaporization of pure Cu and Ag were measured. The experimental results suggest that the ionizing and detecting systems and the electric furnace in the mass spectrometer operates accurately.2.Activities of elements in the Ag-Ga system were determined with a single Knudsen cell method by applying the Belton-Fruehan equation.3.Arsenic activity in the Ga-As system which is a fundamental system of a semiconductors was determined by using the single Knudsen method combined with a monomer-dimmer method as well as activity of gallium.4.The double Knudsen cell method was applied to determine the arsenic activities in the dilute solution of the Cu-As system and the gamma^0_<As> in molten copper were estimated by the experimental results.Those experimental results show that several methods can be applied to complex systems for determination of the thermodynamic properties in the mass spectrometric method. The present research group will measure the thermodynamic properties at diluted solution of complex elements such as arsenic, antimony and phosphorous by the double Knudsen- mass spectrometer.

质谱仪是分析复杂气体（如砷）的最佳方法，砷是III-V半导体中的主要元素。已经制作了由双重聚焦质量分析系统和一个小的电炉组成的双颈质细胞 - 质谱仪的原型，该原型已制成双电炉，并使用双重knudsen细胞，并通过比较双胞胎knudsen细胞中的参考活性样品之间的砷活性样品之间的砷的离子强度来测量砷活性。进行了几种研究以进行质谱仪的效率测试，并获得了以下结果：1。残留气体和砷的电离电位，并测量了纯Cu和Ag的蒸发热。实验结果表明，质谱仪中的电离和检测系统和电炉在质谱仪中的运行能力。2。通过单个knudsen细胞方法确定元素中元素的活性，通过应用Belton-fruehan方程来确定。3。belton-fruehan方程。3.ARSENIC在GA-AS系统中的弧度活性，该系统在GA-AS系统中是通过使用单个方法组成的基本方法，该方法与单一方法组合了，该方法是Andemer-a的基本系统，是Anud的基础系统。 4.使用双颈动细胞方法来确定Cu-As系统稀释溶液中的砷活性，并通过实验结果估算了熔融铜中的γ^0_ <AS>。这些实验结果表明，可以将几种方法应用于复杂的系统中，以确定高质量图中的体热功能方法。本研究小组将通过双颈质量光谱仪来测量复杂元素（例如砷，锑和磷）的稀释溶液中的热力学特性。