Development of a hybrid surface analyzer using total reflection of x-rays

在设计和制作了真空室后，研制了一种集X射线荧光检测系统、电子分析仪和X射线激发样品电流（样品电流）检测系统于一体的混合式表面分析仪。为了验证该表面分析仪的可行性，进行了以下三个实验：1.掠入射条件下的电子能谱实验表明，掠入射条件下的电子能谱在降低电子非弹性散射背景方面具有优势。此外，还从X射线激发样品电流的掠射角依赖关系实验推导出发射电子的衰减长度。2.利用分析深度的差异进行颗粒的深度剖析为了测量粉煤灰中的硫，X射线荧光检测和样品电流检测都被采用。3.大气条件下样品电流检测的表面灵敏度分析研究发现大气条件下样品电流检测比真空条件下样品电流检测具有更高的表面灵敏度。

After the design and the fabrication of a vacuum chamber, a hybrid surface analyzer has been developed with the x-ray fluorescence detection system, electron analyzer and x-ray exicited sample current (sample current) detection system. To evaluate the feasibility of the surface analyzer, the following three experiments were carried out.1.Electron spectroscopy under grazing incidence conditionIt was demonstrated that the electron spectroscopy under grazing incidence is advantageous in reducing the background attributed to the inelastic scattering of the electrons. Moreover, attenuation length of emitted electron was experimentally derived from the glancing angle dependence of the x-ray exicited sample current.2.Depth profiling of a particle utilizing the difference of the analyzing depthTo measure sulfur XAFS of coal flyash, both x-ray fluorescence detection and the sample current detection were employed. The former detection gave information about the bulk and the latter gave that around surface.3.Surface sensitive analysis with sample current detection under atmospheric conditionIt was found that the sample current detection under atmospheric condition is more surface sensitive than that under vacuum.