Development of Scanning Hall Probe Microscope Operable at LOW Temperature and High Magnetic Field

超导体或磁性材料中的局域场映射提供了从全球磁化测量中永远无法获得的有价值的信息。特别是在超导体的情况下，它使得区分来自真实涡旋系统的异常和来自超导体不均匀的虚假异常成为可能。在本研究中，我们将机械三维扫描系统与离子注入的GaAs微霍尔探针阵列相结合，研制了扫描霍尔探针显微镜(SHPM)，该阵列可以在串磁场下低温运行。所有扫描运动和霍尔电阻率测量均由计算机控制。(2)磁场范围：0-9T(可以用另一个超导磁体来扩展)(3)空间分辨率：10um(4)磁场分辨率：1g(5)霍尔探头尺寸：5x5um^2或3x3um^2利用所研制的SHPM测量了Bi2Sr2CaCu2O&lt；8+y&gt；和i-Bi2Sr2CaCu2O&lt；8+y&gt；我们还用垂直排列的砷化镓芯片制作了双分量霍尔探头，并测量了临界场中的两个分量

Local field mapping in superconductors or magnetic materials, gives valuable information which can never be accessed from global magnitization measurements. In particular, in the case of superconductors, it makes it possible to discriminate anomaly originated from real vortex system from spurious one which comes from inhomogeneity of the superconductor.In this study, we developed scanning Hall probe microscope (SHPM) by combining mechanical three dimensional scanning system and micro-Hall-probe array fabricated from ionimplanted GaAs which can be operated at low temperature under string magnetic field. All the scanning motions and Hall resistivity measurements are controlled by computer. Characteristics of the developed sSHPM are as follows.(1)Temperature range : 1.5K-300K (It can be extended by using another cryostat)(2)Magnetic field range : 0-9T (It can be extended by using another superconducting magnet)(3)Spatial resolution : 10mum(4)Magnetic field resolution : 1G(5)Dimensions of Hall probe : 5x5mum^2 or 3x3mum^2Using developed SHPM,we measured critical field profile of Bi_2Sr_2CaCu_2O_<8+y> and I-Bi_2Sr_2CaCu_2O_<8+y>. We also fabricated two component Hall probe using GaAs chips which are arrange in orthogonal way andmeasured two components of field in the critical state