Quasi-optical oscillator with a solid state device array at millimeter wavelengths

该研究项目计划开发一种使用集成固态器件作为实用毫米波辐射源的空间功率组合振荡器。该振荡器将大量固态源器件（如Gunn二极管、谐振隧道二极管（RTD）和HEMT）的相干辐射功率结合在一个准光学谐振腔中，从而产生强烈的辐射功率。在这个项目中，开发了两种类型的准光学谐振器。其中一种是用于大量HEMT的金属槽镜型法布里-珀罗（GFP）谐振器，另一种是用于较少数量的Gunn二极管的喇叭天线耦合法布里-珀罗谐振器。通过该项目完成的理论和实验结果如下：1。准光振荡器设计中等效电路的发展。一种光刻技术的发展，在gfp谐振器的金属槽镜表面安装了超过数百个HEMT。10GHz波段9个HEMT的gfp振荡器振荡观测。实验结果表明，gfp振荡器等效电路是有效的。70 GHz频段两个GaAs-RTD gfp振荡器振荡的观测。这里使用的RTD是作为毫米波短波长的源设备而开发的。采用9二极管同天线耦合谐振器研制60 GHz频段430mw Gunn二极管振荡器。准光振荡器用新型可变输出耦合器的研制。(1)金属网倏逝耦合器利用金属网与硅片之间的倏逝波耦合，具有宽带传输特性，耦合系数变化很大（大于80%）。(2)光控输出耦合器由带金属条光栅的硅板和硅板组成，利用硅板的光激发调制毫米波。少

This research project has been planed to develop a spatial power-combining oscillator using integrated solid-state devices as a practical millimeter-wave radiation source. The oscillator combines coherent radiation powers from a large number of solid-state source devices such as Gunn diodes, resonant tunneling diodes (RTD's), and HEMT's in a quasi-optical resonator, and consequently produces an intense radiation power. In this project, two types of quasi-optical resonators have been developed. One of them is a metal grooved mirror type Fabry-Perot (GFP) resonator for the used of a large number of HEMT's and the other is a horn antenna coupled Fabry-Perotresonator for the use of s amaller number of Gunn diodes. The theoretical and experimental results accomplished through the project are the following :1. Development of the equivalent circuits for designing the quasi-optical oscillators.2. Development of a photo-lithographic technique mounting a number of HEMT's grater than hundreds on … More the surface of the metal grooved mirror in the GFP-resonator.3. Observation of oscillation in the GFP-oscillator with nine HEMT's in 10GHz band. The experiments results have shown that the equivalent circuit of the GFP-oscillator is valid.4. Observation of oscillation in the GFP-oscillator with two GaAs-RTD's in 70 GHz band. The RTD's used here have been developed as a source device for short millimeter wavelengths.5. Development of 60 GHz band 430 mW Gunn diode oscillator using the hom-antenna coupled resonator with nine diodes.6. Development of new type of variable output couplers used in the quasi-optical oscillators.(1) The metal mesh evanescent coupler which makes use of evanescent wave coupling between the metal mesh and the silicon plate, has a wideband transmission property with a largely variable coupling coefficient (more than 80%).(2) The optically controlled output soupler which consists of a silicon plate with a metal strip grating and a silicon plate, can modulate millimeter waves with optical excitation of the silicon plate. Less