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Development of an apparatus for the analysis of chemical reactions on surfaces equipped with a Helium beam apparatus.

开发配备氦束装置的表面化学反应分析装置。

基本信息

批准号：
07504008
负责人：
KUSUNOKI Isao
金额：
$ 6.59万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07504008/
关键词：
molecular beam He scattering surface chemical reaction FTIR LiF differential pumping stepping motor ヘリウム原子散乱表面反応表面構造 LiF シリコンエチレンヘリウム回折

项目摘要

The purpose of this project is to develop an apparatus with which surface reactions and surface structures can be observed, by applying the techniques of supersonic molecular beam. With the apparatus, we want to control the surface reaction by varying the translational energy of molecules impinging on the surface, and observe the property of the reaction using the Helium beam scattering technique.The apparatus is composed of a molecular beam apparatus, a manipulator with which the position of the sample is controlled, a rotatable mass spectrometer, a vacuum chamber and a pumping system.The molecular beam apparatus is working well in point of the triply differential pumping and the control of the translational energy of molecules. As to the manipulator, by the use of stepping motors for use in UHV,the sample can be controlled with high precision which is needed for the experiment of He beam scattering. The rotatable mass spectrometer and a double differential pumping system constructed to reduce the background gas are rotated around the sample.By performing the experiments described below, we ascertained the enough performance of the apparatus.1.We performed He diffraction experiment. We observed the diffraction pattern corresponding to LiF (100) surface structure in the angular distribution of He atoms scattered from the surface when He beam is directed to the sample. We confirmed that the surface structure is measured by the use of He beam.2.We observed that the intensity of specular reflection of He beam from Ni (100) surface decrease with increasing the amount of the adsorbate.3.We observed spectra of submonolayr CO and NH_3 adsorbed on Ni (100) surface.

本计画的目的是利用超音波分子束技术，发展一种可观察表面反应与表面结构的装置。该装置主要由分子束装置、控制样品位置的机械手、可旋转质谱仪、激光器该分子束装置在三次微分抽运和分子平动能控制方面工作良好。在机械手方面，采用超高真空步进电机，实现了对样品的高精度控制，满足了氦束散射实验的需要。旋转质谱仪和双差动抽气系统围绕样品旋转，以减少背景气体。通过进行以下实验，我们确定了装置的足够性能。1.我们进行了He衍射实验。在He束入射样品时，从表面散射He原子的角分布中观察到了与LiF（100）表面结构相对应的衍射图样。实验结果表明：（1）Ni（100）表面对He束的镜面反射强度随吸附量的增加而减小;（2）Ni（100）表面对He束的镜面反射强度随吸附量的增加而减小;（3）Ni（100）表面对CO和NH_3的亚单层吸附光谱。