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Development of a New Surface Treatment of constructional Material for Extreme-high Vacuum Systems

开发用于极高真空系统的新型建筑材料表面处理

基本信息

批准号：
07650851
负责人：
HOMMA Teiichi
金额：
$ 1.47万
依托单位：
CHIBA INSTITUTE OF TECHNOLOGY (CIT)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650851/
关键词：
Extreme-high Vacuum Constructional Material Surface Treatment Outgassing 真空材料

项目摘要

The surface covered with boron nitride overlayr is so inert to chemisorption that it has been considered as one of the candidates for extreme high vacuum uses. This project aims at finding the most proper surface treatment method in order to obtain the extreme low outgassing from stainless steelsurface with the overlayr. A correlation between surface treatments and the precipitation aspects of hexagonal boron nitride (h-BN) on an austenitic stainless steel was studied.Surface treatment, such as buff polishing (BP), electro-polishing (EP), electro-chemical buffing (ECB) and float polishing (FP) were employed. Results obtained are as follows :1.Precipitation aspects of BN on a polished surface with different methods were observed using scanning electron microscopy. It was found that electron channeling pattern showed no evidence of formation of the modified layr near the surface of both FP and EP treatments. On these surfaces, BN was precipitated almost uniformly and covered the whole surfaces. As the thickness of the BN layr increased, strong oriented triangular crystalline BN was observed on FP surface.2.Thermal desorption measurements showed that the surface covered with the strong oriented crystalline h-BN was inert to the gas adsorption. The FP may be a candidate of the most proper surface treatment for BN precipitation.3.A comparison of thermal desorption aspects in correlating with the different treatments of titanium surface shows that a peak height of the desorption spectra depends similarly on the modified surface as of the stainless steel.

氮化硼覆盖层的表面对化学吸附非常惰性，因此被认为是极高真空应用的候选材料之一。本课题的目的是寻找一种最合适的表面处理方法，以获得不锈钢表面极低的出气量。采用抛光(BP)、电抛光(EP)、电化学抛光(ECB)和浮法抛光(FP)等表面处理方法，研究了奥氏体不锈钢表面六方氮化硼(h-BN)表面处理与析出的关系。主要研究结果如下：1.用扫描电子显微镜观察了不同方法制备的BN在抛光表面的析出情况。结果表明，电子沟道图在FP和EP处理的表面附近都没有形成改性层的迹象。在这些表面上，BN几乎均匀地析出并覆盖整个表面。随着BN层厚度的增加，在FP表面观察到强取向的三角晶态BN。2.热脱附测试表明，被强取向晶态h-BN覆盖的表面对气体的吸附是惰性的。Fp可能是最适合于BN沉淀的表面处理。3.与不同的钛表面处理相关联的热脱附方面的比较表明，与不锈钢一样，脱附谱的峰高依赖于改性表面。